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公开(公告)号:KR1020160085991A
公开(公告)日:2016-07-19
申请号:KR1020150002879
申请日:2015-01-08
Applicant: 삼성전자주식회사
IPC: H01L21/677
CPC classification number: G01R31/2893 , H01L21/67721 , H01L21/67727
Abstract: 본발명은프로브카드반송유닛및 그를포함하는프로브카드관리장치를개시한다. 그의유닛은운반물을붙잡는그리퍼들을갖는핸드부와, 상기핸드부를이동하는주행부를포함한다. 상기그리퍼들각각은상기운반물의가장자리에제공되어홀딩바와, 상기홀딩바의팁 상에배치되고, 상기홀딩바에수직한방향으로돌출되어상기운반물을상기홀딩바에고정하는적어도하나의잠금핀을포함할수 있다.
Abstract translation: 根据本发明,公开了一种探针卡传送单元和包括其的探针卡管理装置。 该单元包括:具有抓握包装的夹持器的手部件; 以及移动手部的行进部。 每个夹持器设置在包装的边缘处,并且可以包括:保持杆; 以及至少一个锁定销,其布置在保持杆的尖端上,并且通过沿垂直于保持杆的方向突出来将包装固定到保持杆。 包装运输单元可以自动化探针卡的物流运动。
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公开(公告)号:KR1020160078612A
公开(公告)日:2016-07-05
申请号:KR1020140188108
申请日:2014-12-24
Applicant: 삼성전자주식회사
IPC: H01L21/677
CPC classification number: G01R31/2601 , G01R31/2889 , G01R31/2893 , H01L21/67727
Abstract: 본발명은프로브카드로딩장치및 그를포함하는카드관리시스템을개시한다. 그의장치는, 운반물에고정되는운반물 지그와, 상기운반물 지그를붙잡는핸드를포함하고, 상기운반물을반송하는반송유닛과, 상기반송유닛에의해반송되는상기운반물이로딩되는로드포트를포함한다. 상기로드포트와상기핸드는상기운반물을상기로드포트에정렬하는제 1 정렬핀들과제 1 정렬소켓들을각각포함할수 있다.
Abstract translation: 本发明提供了一种探针卡装载装置和包括该探针卡管理系统的探针卡管理系统,其能够使探针卡的后勤运动自动化。 该装置包括:固定在载体中的载体夹具,夹紧载体夹具的手; 承载载体的托架单元; 以及由托架单元承载的托架所装载的装载口。 负载端口和手可以包括在负载端口处布置载体的第一布置销和第一布置插槽。
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公开(公告)号:KR100462883B1
公开(公告)日:2004-12-17
申请号:KR1020020022752
申请日:2002-04-25
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: PURPOSE: A test head of a semiconductor electrical die sorting(EDS) test apparatus is provided to reduce loss time caused by replacing a device board by simply assembling and disassembling the device board on a stiffener fixed to a mounting unit while using a fix ring including a bearing. CONSTITUTION: A plurality of bearing guiding grooves(106) are formed on the mounting unit(100), separated from each other by a predetermined interval. A slant hole(108) having an downward surface is formed under the bearing guiding groove. A lower coupling groove(110) is formed in the bottom of the mounting unit so that the mounting unit includes a rotation case(102) capable of rotating at a predetermined angle. A bearing insertion groove(140) corresponding to the bearing guiding groove is formed in the outside of the stiffener(120). An upper coupling groove(138) corresponding to the lower coupling groove is formed so that the stiffener is fixed to the inside of the rotation case of the mounting unit by a fixing screw(144). The device board(150) is positioned on the stiffener. The fix ring(160) is inserted into the bearing insertion groove and the bearing guiding groove of the stiffener by interposing the device board. A bearing(166) that is coupled and fixed to the slant hole by the rotation of the rotation case is installed in the bottom surface of the fix ring.
Abstract translation: 目的:提供一种半导体电子芯片分选(EDS)测试设备的测试头,以通过简单地装配和拆卸固定在安装单元上的加强件上的装置板,同时使用固定环来减少由更换装置板导致的损耗时间,包括 一个轴承。 构成:多个轴承导向槽(106)形成在安装单元(100)上,彼此分开预定间隔。 在轴承导向槽下方形成具有向下表面的倾斜孔(108)。 下连接槽(110)形成在安装单元的底部,使得安装单元包括能够以预定角度旋转的旋转壳体(102)。 在加强件120的外侧形成有与轴承引导槽对应的轴承插入槽140。 对应于下连接槽的上连接槽(138)形成为使得通过固定螺钉(144)将加强件固定到安装单元的转动壳体的内部。 装置板(150)位于加强件上。 通过插入装置板,固定环(160)插入加强件的轴承插入槽和轴承导向槽中。 通过旋转壳体的旋转而联接并固定到斜孔的轴承(166)安装在固定环的底面中。
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公开(公告)号:KR1020030084188A
公开(公告)日:2003-11-01
申请号:KR1020020022752
申请日:2002-04-25
Applicant: 삼성전자주식회사
IPC: H01L21/66
Abstract: PURPOSE: A test head of a semiconductor electrical die sorting(EDS) test apparatus is provided to reduce loss time caused by replacing a device board by simply assembling and disassembling the device board on a stiffener fixed to a mounting unit while using a fix ring including a bearing. CONSTITUTION: A plurality of bearing guiding grooves(106) are formed on the mounting unit(100), separated from each other by a predetermined interval. A slant hole(108) having an downward surface is formed under the bearing guiding groove. A lower coupling groove(110) is formed in the bottom of the mounting unit so that the mounting unit includes a rotation case(102) capable of rotating at a predetermined angle. A bearing insertion groove(140) corresponding to the bearing guiding groove is formed in the outside of the stiffener(120). An upper coupling groove(138) corresponding to the lower coupling groove is formed so that the stiffener is fixed to the inside of the rotation case of the mounting unit by a fixing screw(144). The device board(150) is positioned on the stiffener. The fix ring(160) is inserted into the bearing insertion groove and the bearing guiding groove of the stiffener by interposing the device board. A bearing(166) that is coupled and fixed to the slant hole by the rotation of the rotation case is installed in the bottom surface of the fix ring.
Abstract translation: 目的:提供半导体电子模具分选(EDS)测试装置的测试头,以减少在使用固定环时简单地将固定到安装单元上的加强件上的设备板组装和拆卸,从而更换设备板而导致的损耗时间,包括 轴承。 构成:多个轴承导向槽(106)形成在安装单元(100)上,以预定的间隔彼此分开。 在轴承导向槽的下方形成具有向下表面的倾斜孔(108)。 在安装单元的底部形成下连接槽(110),使得安装单元包括能够以预定角度旋转的旋转壳体(102)。 在加强件(120)的外侧形成有与轴承引导槽对应的轴承插入槽(140)。 形成对应于下连接槽的上连接槽(138),使得加强件通过固定螺钉(144)固定到安装单元的旋转壳体的内部。 装置板(150)位于加强件上。 通过插入装置板将固定环(160)插入轴承插入槽和加强件的轴承导向槽中。 通过旋转壳体的旋转而联接并固定到倾斜孔的轴承(166)安装在固定环的底表面中。
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