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公开(公告)号：KR2019970046654U
公开(公告)日：1997-07-31
申请号：KR2019950048871
申请日：1995-12-27
Applicant: 삼성전자주식회사
IPC: H01L21/205
Abstract: 본고안은반도체기판상에특정한막질을형성하기위한프로세스챔버와이 프로세스챔버를진공상태로유지하기위하여배기하는진공펌프를구비한화학기상증착장치에서상기프로세스챔버와상기진공펌프사이의진공라인에설치되는아이솔레이션밸브에관한것으로서, 진공포트(11b)가설치된진공라인결합부(11)에, 0-링(12), 벨로우즈(13), 고무패킹(14), 플라스틱지지대(15), 스프링(16), 스프링홀더(17)가차례로결합되어있는구조를갖고, 그리고세트스크류(18)가상기스프링홀더(17)의나사공(17a), 플라스틱지지대(15)의나사공(15a) 그리고진공라인결합부(11)의나사공(11a)를차례로관통하면서나사결합되는구조를가지며, 더욱이상기세트스크류(18)와는별도의세트스크류를이용하여상기스프링홀더(17)의나사공(17b)과상기플라스틱지지대(15)의나사공(15b)를차례로관통하여나사결합되어있는구조를갖는다. 이러한아이솔레이션밸브에의하면, 그세척을위한분해조립시불필요한부분까지분해하지않고작업할수 있기때문에작업공수를덜뿐만아니라그 불필요한부분까지분해하므로써나타나는파손등의문제를방지할수 있다.
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公开(公告)号：KR1019900007023B1
公开(公告)日：1990-09-27
申请号：KR1019860007478
申请日：1986-09-06
Applicant: 삼성전자주식회사
CPC classification number: H04N9/8355 , G11B5/0086 , G11B15/4678 , G11B15/61 , H04N5/7826 , H04N5/78263
Abstract: The 4mm video tape maximising the video region and making the format compatible to other standard is formated with a first guide region (C3) contacted in minimum by upper drum, an option track region contacted in minimum by lower drum and recording the audio signal, a second guide region (F3) separating the audio and video signals, a first and second overlap regions (H33a-b) recording the signal with video heads of the first and second channels as overlapping, and a video region (W3) recording the video, ATF, luminance, and colour signals.
Abstract translation: 使最大化视频区域并使与其他标准兼容的格式的4mm视频磁带形成为具有通过上鼓至少接触的第一引导区域（C3），由下鼓最小接触的选项轨道区域并记录音频信号， 第二引导区域（F3），分离音频和视频信号;第一和第二重叠区域（H33a-b），其将与第一和第二通道的视频头重叠的信号重叠;以及记录视频的视频区域（W3） ATF，亮度和颜色信号。
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