公开(公告)号：WO2019066317A1

公开(公告)日：2019-04-04

申请号：PCT/KR2018/010657

申请日：2018-09-12

Applicant: 삼성전자주식회사

Inventor： 김동욱 ,  박진범

IPC: G06F21/56 ,  G06F9/455

Abstract: 전자 장치 및 그의 제어 방법이 개시된다. 본 개시에 따른 전자 장치는, 메모리 및 캐시 메모리 및 CPU를 포함하며, 메모리에 저장된 프로그램을 이용하여 전자 장치를 제어하는 프로세서를 포함하며, CPU는, 캐시 메모리에 입력값이 액세스되는 입력 주소를 모니터링하며, 캐시 메모리에 입력값이 액세스되는 입력 주소가 기 설정된 패턴으로 변경되는 경우, 입력 주소를 변경하는 것을 특징으로 한다.

公开(公告)号：KR1020070013488A

公开(公告)日：2007-01-31

申请号：KR1020050067828

申请日：2005-07-26

Applicant: 삼성전자주식회사

Inventor： 이영우 ,  유수건 ,  박영태 ,  박진범

IPC: H01L21/02

Abstract: A semiconductor manufacturing apparatus having a coolant recovery system is provided to reduce a driving cost of the manufacturing apparatus by recycling the coolant after a rinsing process. A semiconductor manufacturing apparatus having a coolant recovery system includes a semiconductor manipulation unit(111), a cooling unit(121), and a coolant recovery system. The semiconductor manipulation unit includes a chamber, where a semiconductor manipulation process is performed. The cooling unit supplies coolant through a coolant supply tube, which is connected to the semiconductor manipulation unit to cool down the chamber. After a cooling process, the cooling unit recollects the coolant through a coolant recovery tube, which is connected to the semiconductor manipulation unit. The coolant recovery system is connected to the coolant supply tube and the coolant recovery tube and recollects the coolant after a rinsing process. When the semiconductor manipulation unit or the chamber is rinsed, the coolant recovery system supplies the coolant to the cooling unit.

Abstract translation: 提供具有冷却剂回收系统的半导体制造装置，以通过在漂洗处理之后再循环冷却剂来减少制造装置的驱动成本。 具有冷却剂回收系统的半导体制造装置包括半导体操作单元（111），冷却单元（121）和冷却剂回收系统。 半导体操作单元包括执行半导体操作处理的室。 冷却单元通过冷却剂供应管提供冷却剂，冷却剂供应管连接到半导体操纵单元以冷却室。 在冷却过程之后，冷却单元通过连接到半导体操纵单元的冷却剂回收管回收冷却剂。 冷却剂回收系统连接到冷却剂供应管和冷却剂回收管，并在冲洗过程之后回收冷却剂。 当半导体操作单元或室被冲洗时，冷却剂回收系统将冷却剂供应到冷却单元。

公开(公告)号：KR1020170105353A

公开(公告)日：2017-09-19

申请号：KR1020160028467

申请日：2016-03-09

Applicant: 삼성전자주식회사

Inventor： 이기훈 ,  허종오 ,  김지훈 ,  박진범 ,  김동욱

IPC: G06F21/79 ,  G06F11/30 ,  G06F12/14 ,  G06F21/60 ,  G06F21/57

CPC classification number: G06F12/1425 ,  G06F2212/1052

Abstract: 본발명에따른전자장치에있어, 보호영역을가지며, 보호영역에제1운영체제및 제1운영체제와연관된적어도하나의제1프로그램의데이터를저장하는메모리와; 적어도하나의제1프로그램과, 제1운영체제보다높은권한의제2운영체제와연관된적어도하나의제2프로그램을실행하는적어도하나의프로세서와; 메모리의보호영역에대한액세스발생여부를감지하고, 액세스발생시 액세스를차단하고, 보호영역에저장된데이터에대한보안검증을수행하도록하는메모리감시부를포함한다. 이와같은전자장치에있어, 보안영역과일반영역이분리되어있는 CPU 환경에서메모리를직접감시할수 있는하드웨어장치를이용하여전자장치의무결성을보장할수 있는효과가있다.

Abstract translation: 在该电子设备根据本发明，具有的存储器的受保护区域，用于存储和第一操作系统的数据的第一至少与操作系统在保护区域相关联的第一程序; 至少一个处理器执行至少与至少一种第一程序，第一操作系统比高权威的第二操作系统相关联的第二节目; 它包括用于感测访问的存储器保护区的发生的存储器监视器，在访问的情况下，块存取和，进行存储在受保护区域部分中的数据的安全验证。 因此，在这样的电子装置中使用，可直接从在其中安全区和一般区域被分离存在能够确保电子装置的完整性的影响的环境监视存储器，CPU的硬件装置。

公开(公告)号：KR1020070063949A

公开(公告)日：2007-06-20

申请号：KR1020050124372

申请日：2005-12-16

Applicant: 삼성전자주식회사

Inventor： 최익선 ,  유수건 ,  박진범

IPC: H01L21/02 ,  H01L21/205

Abstract: A pump attaching/detaching jig and a method for attaching/detaching a pump using the same are provided to install a turbo pump at a correct position at an accurate angle by using a jig of which angle and positioning are easily adjusted. A cylinder(110) is fixed to a bottom at one side thereof. First and second supports(120,130) are respectively fitted and fixed to both sides of the cylinder. A pump base(140) is positioned between the first and second supports, and supports a pump which is movable up and down. The pump base has a first base(141) supporting a bottom of the pump and a second base mechanically fastened to the first base and fitted in the cylinder to fix the first base.

Abstract translation: 提供泵安装/拆卸夹具以及使用其安装/拆卸泵的方法，通过使用容易调节角度和定位的夹具将涡轮泵以准确的角度安装在正确的位置。 气缸（110）在其一侧固定到底部。 第一和第二支撑件（120,130）分别安装并固定在气缸的两侧。 泵基座（140）位于第一和第二支撑件之间，并且支撑可上下移动的泵。 泵底座具有支撑泵的底部的第一基座（141）和机械地紧固到第一基座的第二基座并且装配在气缸中以固定第一基座。

公开(公告)号：KR1020090011775A

公开(公告)日：2009-02-02

申请号：KR1020070075697

申请日：2007-07-27

Applicant: 삼성전자주식회사

Inventor： 이영우 ,  유수건 ,  박영태 ,  최진호 ,  박진범 ,  나영필

IPC: H01L23/34

CPC classification number: H01L21/67098 ,  H01L21/324 ,  H01L21/6719

Abstract: A cooling apparatus and a method, and facility for treating a substrate with the same are provided to improve the substrate processing process efficiency by preventing that the cooling efficiency of chiller is degraded. A condenser(110) diversifies the gas refrigerant of high pressure and high temperature into the liquid coolant of normal-temperature-high-pressure. An expander(120) diversifies the liquid coolant of normal-temperature-high-pressure into the liquid coolant of low temperature and low pressure. An evaporator(130) diversifies the liquid coolant of low temperature and low pressure into the gas phase. A compressor(140) diversifies the gas refrigerant of low temperature and low pressure into the gas refrigerant of high pressure and high temperature.

Abstract translation: 提供冷却装置和方法以及用于处理基板的设备，以通过防止冷却器的冷却效率降低来提高基板处理工艺效率。 冷凝器（110）使高压高温的气体制冷剂多样化成常温高压的液体冷却剂。 扩展器（120）使常温高压液体冷却剂多样化成低温低压的液体冷却剂。 蒸发器（130）将低温低压的液体冷却剂多样化到气相中。 压缩机（140）将低温低压的气体制冷剂分散到高压高温的气体制冷剂中。