公开(公告)号：KR1020010106446A

公开(公告)日：2001-11-29

申请号：KR1020017002051

申请日：1999-06-17

Applicant: 삼성전자주식회사

Inventor： 이바노프블라디미르엔. ,  말라쉰빅토르아이. ,  피사레프세르게이비. ,  포베레니데니스지. ,  로그안드레이엘. ,  실린미카일유. ,  페도도프보리스디. ,  셰브샤비치보리스비.

IPC: G08B21/02

Abstract: A method of fabricating a distributed reflection multilayer mirror having thin layers (102, 103) with different refractive indices formed by an ink- jet liquid-phase film forming method. The film forming method comprises applying a thin layer material for forming thin layers, and setting the material. Thin layers are formed of a fine arrangement pattern simply in a short time, and a high-precision high-reliability multilayer film is formed. Therefore, the film thickness and reflection characteristics such as the reflectivity of the mirror are easily controlled.

Abstract translation: 一种制造具有由喷墨液相膜形成方法形成的具有不同折射率的薄层（102,103）的分布式反射多层反射镜的方法。 成膜方法包括施加用于形成薄层的薄层材料，并设置材料。 薄层简单地在短时间内由精细布置图案形成，并且形成高精度高可靠性多层膜。 因此，容易控制诸如反射镜的反射率的膜厚度和反射特性。