公开(公告)号：KR1020050005306A

公开(公告)日：2005-01-13

申请号：KR1020030044348

申请日：2003-07-01

Applicant: 삼성전자주식회사

Inventor： 안금찬

IPC: H01L21/265

Abstract: PURPOSE: An electrode assembly for an ion implanting apparatus is provided to reduce contamination of an electrode, and to extend the lifetime of the electrode by using the rest of the slits even if one of the slits is damaged. CONSTITUTION: A suppression electrode(110) has at least two slits of the same size. An extraction electrode(120) has at least two slits of the same size. The width of the slit of the suppression electrode is smaller than that of the extraction electrode. The slit has a proper width for an ion implantation process at ion implantation energy not higher than 20 kiloelectron volt.

Abstract translation: 目的：提供用于离子注入装置的电极组件以减少电极的污染，并且即使其中一个狭缝被损坏，也可以通过使用其余的狭缝来延长电极的寿命。 构成：抑制电极（110）具有至少两个相同尺寸的狭缝。 提取电极（120）具有至少两个相同尺寸的狭缝。 抑制电极的狭缝的宽度小于提取电极的宽度。 在离子注入能量不超过20千伏特电压时，狭缝具有用于离子注入工艺的适当宽度。

公开(公告)号：KR100422900B1

公开(公告)日：2004-03-12

申请号：KR1020010025554

申请日：2001-05-10

Applicant: 삼성전자주식회사

Inventor： 금경수 ,  양윤식 ,  홍형식 ,  안금찬 ,  윤해근 ,  정병식 ,  최기철

IPC: G01B5/004

CPC classification number: H01L21/68 ,  H01J2237/20292 ,  H01J2237/31701

Abstract: An apparatus for use in orienting an object at a reference angle includes a pin gauge having at least two projections located at an end of the body of the apparatus. The projections are located at certain X Y coordinates of an X, Y Z Cartesian coordinate system. A horizontal support supports the body so as to be movable horizontally in the longitudinal direction of the projections. A mechanical drive member is operable to move the body mechanically in the horizontal direction. The apparatus may also include a vertical support and vertical drive member. The pin gauge is mechanically moved into contact with a surface of an object to provide a reference angle for the object. Then the object is pivoted, if necessary, to bring the surface into point contact with all of the projections of the pin gauge, whereupon the object is oriented at the reference angle. Process errors in aligning the object using the reference angle are reduced because the orienting of the object at the reference angle is accomplished using mechanical elements.

Abstract translation: 用于以参考角度定向物体的设备包括具有至少两个位于设备主体端部的凸起的销规。 投影位于X，Y Z笛卡尔坐标系的某些X Y坐标处。 水平支撑件支撑主体以便在突起的纵向方向上水平移动。 机械驱动构件可操作以在水平方向上机械地移动主体。 该设备还可以包括垂直支撑和垂直驱动构件。 销规机械地移动到与物体的表面接触以提供物体的参考角度。 然后，如果需要的话，将物体转动以使表面与销规的所有突出物点接触，于是物体以参考角度定向。 使用参考角度对准对象时的处理误差减小，因为在参考角度处的对象的定向是使用机械元件完成的。

公开(公告)号：KR1020020085980A

公开(公告)日：2002-11-18

申请号：KR1020010025554

申请日：2001-05-10

Applicant: 삼성전자주식회사

Inventor： 금경수 ,  양윤식 ,  홍형식 ,  안금찬 ,  윤해근 ,  정병식 ,  최기철

IPC: G01B5/004

CPC classification number: H01L21/68 ,  H01J2237/20292 ,  H01J2237/31701

Abstract: PURPOSE: A reference angle supply apparatus is provided to minimize process error caused due to the movement of the apparatus, by accurately setting an object for measurement on the basis of a reference angle. CONSTITUTION: A reference angle supply apparatus(30) comprises a main body(300); pin gauges(310) protruded from the surface of an end of the main body, at portions set by X-axis coordinates and Y-axis coordinates, respectively. Each of pin gauges contacts surface of an object for measurement, and supplies a preset reference angle, to thereby correct the object by the preset reference angle. The apparatus further comprises a main body support(320) for supporting the main body, and which has a horizontal guide(320a) for moving the main body in a horizontal direction when pin gauges contact the object for measurement. The main body support has a surface which is processed to have a uniformity of 1 micron meter or smaller, such that the pin gauge is substantially parallel to a bottom of a chamber.

Abstract translation: 目的：提供一种参考角度供给装置，用于通过基于参考角准确地设定用于测量的物体来最小化由于装置的移动而引起的处理误差。 构成：参考角供给装置（30）包括主体（300）; 分别从X轴坐标和Y轴坐标设定的部分从主体的端部的表面突出的销量规（310）。 每个针规与物体的表面接触测量，并提供预设的参考角度，从而通过预设的参考角度校正物体。 该装置还包括用于支撑主体的主体支撑件（320），并且当销量与接触物体接触以进行测量时，该主体支撑件（320）具有用于沿水平方向移动主体的水平导向件（320a）。 主体支撑具有被加工成具有1微米或更小的均匀度的表面，使得销规与基座平行。