公开(公告)号：KR101767663B1

公开(公告)日：2017-08-16

申请号：KR1020120080715

申请日：2012-07-24

Applicant: 삼성전자주식회사 ,  세메스 주식회사

Inventor： 이영철 ,  권세민 ,  이진환 ,  오제묵 ,  이경숙 ,  이남홍

IPC: G01R31/28 ,  G01R1/04

Abstract: 본발명은기판을제조하는장치를제공한다. 기판제조설비는기판에대해검사공정을수행하는테스트핸들러모듈을가지는검사장치를포함한다. 상기테스트핸들러모듈은기판을반송하는컨베이어유닛, 기판에대해상기검사공정을수행하는핸들러유닛, 상기컨베이어유닛과상기핸들러유닛간에기판을반송하는반송유닛을포함할수 있다. 상기컨베이어유닛은공급컨베이어와상기공급컨베이어로부터이격된배출컨베이어를가질수 있다.

公开(公告)号：KR101936348B1

公开(公告)日：2019-01-08

申请号：KR1020120103015

申请日：2012-09-17

Applicant: 삼성전자주식회사

Inventor： 오제묵 ,  김상일 ,  민병준 ,  박종필

IPC: G01R31/26

公开(公告)号：KR1020140037394A

公开(公告)日：2014-03-27

申请号：KR1020120103015

申请日：2012-09-17

Applicant: 삼성전자주식회사

Inventor： 오제묵 ,  김상일 ,  민병준 ,  박종필

IPC: G01R31/26

CPC classification number: G01R31/2601 ,  G01R31/2865 ,  G01R31/2874

Abstract: Disclosed in the present invention are a test handler and a test method for a semiconductor element using the same. The test handler includes: chambers which provide a closed inner space for accommodating a first tray onto which semiconductor elements are loaded; a test module which electrically touches the semiconductor elements in the chambers in order to perform a test process of the semiconductor elements; and a sorting unit which loads or unloads the first tray in the chambers and sorts out semiconductor elements which are determined as faulty in the test process. The chambers may have a fluid path for circulating a coolant or a heat medium inside the walls in order to enable fast temperature switching between a first temperature below the room temperature and a second temperature above the room temperature during the test process of the semiconductor elements.

Abstract translation: 在本发明中公开了一种使用其的半导体元件的测试处理器和测试方法。 测试处理器包括：提供封闭内部空间的室，用于容纳加载有半导体元件的第一托盘; 测试模块，其电接触所述腔室中的半导体元件，以便执行半导体元件的测试过程; 以及分类单元，其将室内的第一托盘装载或卸载，并对在测试过程中被确定为故障的半导体元件进行分类。 腔室可以具有用于在壁内循环冷却剂或热介质的流体路径，以便在半导体元件的测试过程期间实现在室温以下的第一温度和高于室温的第二温度之间的快速温度切换。

公开(公告)号：KR1020130111915A

公开(公告)日：2013-10-11

申请号：KR1020120080715

申请日：2012-07-24

Applicant: 삼성전자주식회사 ,  세메스 주식회사

Inventor： 이영철 ,  권세민 ,  이진환 ,  오제묵 ,  이경숙 ,  이남홍

IPC: G01R31/28 ,  G01R1/04

CPC classification number: G01R31/2601 ,  G01R1/0408 ,  G01R31/2808 ,  G01R31/2862 ,  G01R31/2863 ,  G01R31/2867

Abstract: PURPOSE: A circuit board manufacturing facility including a testing device and a circuit board manufacturing method thereof are provided to effectively execute a circuit testing process. CONSTITUTION: A testing device includes a test handler module (1300). The test handler module executes an inspection process for a circuit board. The test handler module includes a conveyor unit (1400), a handler unit (1600), and a carriage unit (1500). The conveyor unit includes a supply conveyor (1420) and a discharge conveyor (1430). The discharge conveyor is separated from the supply conveyor. The handler unit executes an inspection process for the circuit board. The carriage unit returns the circuit board between the conveyor unit and the handler unit.

Abstract translation: 目的：提供包括测试装置和电路板制造方法的电路板制造设备，以有效地执行电路测试过程。 规定：测试装置包括测试处理程序模块（1300）。 测试处理程序模块执行电路板的检查过程。 测试处理模块包括输送单元（1400），处理单元（1600）和托架单元（1500）。 输送机单元包括供料输送机（1420）和排料输送机（1430）。 排放输送机与供应输送机分离。 处理器单元执行电路板的检查处理。 托架单元将输送单元和处理单元之间的电路板返回。