公开(公告)号：KR1020090004015A

公开(公告)日：2009-01-12

申请号：KR1020070067886

申请日：2007-07-06

Applicant: 삼성전자주식회사

Inventor： 전제철 ,  이수찬 ,  전찬제 ,  신민규 ,  유선두 ,  정홍구

IPC: G01J1/02

Abstract: A sensor for waterproof is provided to prolong the service life of a sensor by protecting internal components from chemical solution with a cover member. A sensor for waterproof comprises a light emitting part(10) or a light receiving part(20) which emits and detects beam for sensing; a cable(30) connected to the light emitting part or the light receiving part; and a cover member(40) sealing the light emitting part or the light receiving part as well as the cable. A penetrating window(51) through which beam passes is equipped in one end of the cover member.

Abstract translation: 提供一种防水传感器，通过用盖件保护内部组件免受化学溶液的影响，延长传感器的使用寿命。 用于防水的传感器包括发射和检测用于感测的光束的发光部分（10）或光接收部分（20） 连接到发光部分或光接收部分的电缆（30）; 以及密封发光部或光接收部以及电缆的盖部件（40）。 在盖构件的一端装有通过梁的穿透窗（51）。

公开(公告)号：KR1020080006202A

公开(公告)日：2008-01-16

申请号：KR1020060065047

申请日：2006-07-11

Applicant: 삼성전자주식회사

Inventor： 김선재 ,  손형일 ,  김영일 ,  양정욱 ,  양득용 ,  전찬제 ,  강석성 ,  송석규

IPC: G02F1/13

CPC classification number: G02F1/1309 ,  G01B11/30

Abstract: A display substrate tester and a method thereof are provided to enhance the accuracy of a visual inspection by automatically producing the height of a protrusion formed on a display substrate. A display substrate tester(100) comprises a light source part(120), an image pickup part(130) and a measuring part(140). The light source part(120) emits light and provides it to a display substrate(200) on which a color filter layer is formed and which reveals a specific color using the light provided from the light source part(120). The image pickup part(130), such as a camera, etc., installed at the upper part of the light source part(120), photographs a protrusion area, where a protrusion is formed on the display substrate(200), and a peripheral area, which encloses the protrusion area, and creates a test image. The measuring part(140) receives the test image from the image pickup part(130), produces the color coordinate value of the protrusion area and the color coordinate value of the peripheral area on the basis of the test image, and obtains the height of the protrusion.

Abstract translation: 提供显示基板测试器及其方法，以通过自动产生形成在显示基板上的突起的高度来提高目视检查的精度。 显示基板测试器（100）包括光源部分（120），图像拾取部分（130）和测量部分（140）。 光源部分（120）发光并将其提供到其上形成滤色器层的显示基板（200），并且使用从光源部分（120）提供的光来显示特定的颜色。 安装在光源部分（120）的上部的诸如相机等的图像拾取部分（130）拍摄在显示基板（200）上形成突起的突起区域，并且 外围区域，其包围突出区域，并且创建测试图像。 测量部分（140）从图像拾取部分（130）接收测试图像，基于测试图像产生突出区域的颜色坐标值和周边区域的颜色坐标值，并且获得 突起。

公开(公告)号：KR1020070063835A

公开(公告)日：2007-06-20

申请号：KR1020050124090

申请日：2005-12-15

Applicant: 삼성전자주식회사

Inventor： 전찬제

IPC: G02F1/13

CPC classification number: G02F1/13 ,  G03F7/20 ,  H01L21/0274 ,  H01L21/324 ,  H01L21/67742

Abstract: A bake apparatus and a photolithography system comprising the same are provided to improve the processing speed in a photolithographic process for forming a predetermined pattern on a substrate, by using a bake unit for rapidly heating the substrate through UV(Ultra Violet) lamps. A bake apparatus comprises a bake unit for heating a substrate, and a cooling unit for cooling the heated substrate. The bake unit includes a chamber(511) having a space for receiving the substrate, a substrate supporting part(513) for supporting the substrate, and at least one lamp(515), such as a UV lamp, for heating the substrate. The bake unit further comprises a transfer robot for transferring the substrate. The lamp is disposed below the substrate.

Abstract translation: 提供一种烘焙设备和包括该烘焙设备的光刻系统，以通过使用用于通过UV（超紫色）灯快速加热衬底的烘烤单元来提高用于在衬底上形成预定图案的光刻工艺中的处理速度。 烘烤装置包括用于加热基底的烘烤单元和用于冷却被加热的基底的冷却单元。 烘烤单元包括具有用于接收基板的空间的室（511），用于支撑基板的基板支撑部（513）和用于加热基板的至少一个灯（515），例如UV灯。 烘烤单元还包括用于转移衬底的传送机器人。 灯被设置在基板下方。

公开(公告)号：KR1020070062796A

公开(公告)日：2007-06-18

申请号：KR1020050122604

申请日：2005-12-13

Applicant: 삼성전자주식회사

Inventor： 전찬제 ,  김영일 ,  임동원

IPC: G02F1/1335

CPC classification number: G02F1/133514 ,  B41J2/01 ,  G02F1/1303 ,  G02F1/133512 ,  H01L21/304

Abstract: A method for manufacturing a color filter substrate for an LCD(Liquid Crystal Display) is provided to improve the uniformity of color through planarization of color filters, by performing a polishing process while the color filters are formed through an inkjet printing method. A black matrix pattern(20) is formed on a substrate(10). Color filters(30a,30b,30c) are formed by sequentially jetting red ink, green ink, and blue ink in openings of the black matrix pattern. Upper portions of the black matrix and the color filters are polished. The polishing of the black matrix pattern and the color filters is performed by lapping or grinding method. The black matrix pattern is formed of opaque resin.

Abstract translation: 提供一种用于制造用于LCD（液晶显示器）的滤色器基板的方法，用于通过在通过喷墨打印方法形成滤色器的同时进行抛光处理，通过滤色器的平坦化来提高颜色的均匀性。 在基板（10）上形成黑矩阵图案（20）。 彩色滤光片（30a，30b，30c）通过在黑色矩阵图案的开口中依次喷射红色墨水，绿色墨水和蓝色墨水而形成。 黑色矩阵和滤色片的上部被抛光。 通过研磨或研磨方法进行黑矩阵图案和滤色器的抛光。 黑色矩阵图案由不透明树脂形成。