公开(公告)号：KR1020150092673A

公开(公告)日：2015-08-13

申请号：KR1020140013319

申请日：2014-02-05

Applicant: 삼성전자주식회사

Inventor： 전경훈 ,  김요정 ,  이규정 ,  정일교

IPC: H01L21/66

CPC classification number: G01R31/3025 ,  G01R31/26 ,  G01R31/27 ,  G01R31/308 ,  G06F19/00

Abstract: A probe card according to the technical idea of the present invention is the probe card for testing the electrical property of a device to be tested which includes a plurality of semiconductor devices. The probe card according to the present invention includes a substrate and at least one transmission antenna which is implemented with a COF type, is attached on the substrate, and wirelessly transmits at least one of power and data to each semiconductor device.

Abstract translation: 根据本发明的技术思想的探针卡是用于测试包括多个半导体器件的待测试器件的电性能的探针卡。 根据本发明的探针卡包括基板，并且在基板上安装实施有COF型的至少一个发射天线，并将功率和数据中的至少一个无线发送到每个半导体器件。