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公开(公告)号：KR1020020085483A
公开(公告)日：2002-11-16
申请号：KR1020010025002
申请日：2001-05-08
Applicant: 삼성전자주식회사
Inventor： 조상우
IPC: H01L21/02
Abstract: PURPOSE: A semiconductor fabricating apparatus using plasma is provided to effectively exhaust particles inside a chamber, by using an electrical property of the particles as well as pressure difference caused by a pump. CONSTITUTION: A lower electrode(24) and an upper electrode(22) for generating plasma are installed in the chamber(20). A process using the plasma is performed in the chamber. One end of the first exhaust line(26) is connected from the inside of the chamber to the exterior. The other end of the first exhaust line is connected to the pump(30) for exhausting the particles generated in the process using the plasma. The second exhaust line(28) is branched from the side surface of the first exhaust line, connected to a predetermined portion of the inside of the chamber. The side surface of the second exhaust line is electrified by an electrical field inducing unit connected to the second exhaust line.
Abstract translation: 目的：提供使用等离子体的半导体制造装置，通过使用颗粒的电特性以及由泵引起的压力差来有效地排出室内的颗粒。 构成：在室（20）中安装用于产生等离子体的下电极（24）和上电极（22）。 在室中进行使用等离子体的工艺。 第一排气管（26）的一端从室的内部连接到外部。 第一排气管线的另一端连接到泵（30），用于排出在使用等离子体的过程中产生的颗粒。 第二排气管路（28）从第一排气管路的侧面分支，连接到室内部的预定部分。 第二排气管路的侧表面由连接到第二排气管线的电场感应单元带电。
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Patent Agency Ranking
公开(公告)号：KR1020040046207A
公开(公告)日：2004-06-05
申请号：KR1020020074046
申请日：2002-11-26
Applicant: 삼성전자주식회사
IPC: H01L21/68
Abstract: PURPOSE: A lifting apparatus is provided to prevent lifting error by stably fixing a lift pin to a plate using a fixing part. CONSTITUTION: A lifting apparatus is provided with a lift pin(140) for loading and unloading a semiconductor substrate along a through hole(120) of a substrate support part(100), a plate(160) located at the lower portion of the substrate support part for vertically supporting the lift pin and moving the lift pin up and down by using a vertical driving force, and a fixing part for fixing the lift pin on the upper surface of the plate in order to prevent the lift pin from being shaken due to the vertical motion of the lift pin and the plate. Preferably, the fixing part includes a protrusion protruded from the lower lateral portion of the lift pin and a storing groove formed on the upper surface of the plate for fixing the lift pin to the plate.
Abstract translation: 目的：提供一种提升装置，通过使用固定部将升降销稳固地固定在板上来防止提升错误。 构成：提升装置设置有用于沿着衬底支撑部分（100）的通孔（120）装载和卸载半导体衬底的升降销（140），位于衬底的下部的板（160） 支撑部件，用于垂直支撑提升销，并使用垂直驱动力上下移动提升销;以及固定部分，用于将升降销固定在板的上表面上，以防止升降销因为振动 到升降销和板的垂直运动。 优选地，固定部分包括从提升销的下侧部分突出的突起和形成在板的上表面上的用于将提升销固定到板的存储槽。
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公开(公告)号：KR1020150032404A
公开(公告)日：2015-03-26
申请号：KR1020130111527
申请日：2013-09-17
Applicant: 삼성전자주식회사
Abstract: Provided are a refrigerator and a control method thereof, capable of counting opening and closing times of a door of the refrigerator and analyzing the pattern to perform defrosting at a time when a user less frequently uses the refrigerator. To this end, according to an embodiment of the present invention, the refrigerator includes: an evaporator; a defrosting heater installed near the evaporator; an input unit arranged to set a learning defrost function of the defrosting heater; a door opening and closing sensor sensing an opening and closing of the door of the refrigerator when setting the learning defrost function by the input unit; a memory storing sensed data about the opening and closing of the door; and a control unit counting the opening and closing times of the door based on the stored data, analyzing the pattern, determining a time to defrost based on the analysis, and controlling the defrosting heater.
Abstract translation: 本发明提供一种冰箱及其控制方法，其能够对用户较少频繁地使用冰箱的时候对冰箱的门的开闭时间进行计数，并分析该图案进行除霜。 为此，根据本发明的实施例，冰箱包括：蒸发器; 安装在蒸发器附近的除霜加热器; 布置成设置除霜加热器的学习除霜功能的输入单元; 当由所述输入单元设定所述学习除霜功能时，门打开和关闭传感器感测所述冰箱的门的打开和关闭; 存储关于门的打开和关闭的感测数据的存储器; 以及控制单元，基于所存储的数据对门的打开和关闭时间进行计数，分析图案，基于分析确定除霜时间，以及控制除霜加热器。
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