반도체 소자의 불량분석 방법
    2.
    发明公开
    반도체 소자의 불량분석 방법 无效
    半导体缺陷分析方法

    公开(公告)号:KR1020000027094A

    公开(公告)日:2000-05-15

    申请号:KR1019980044928

    申请日:1998-10-27

    Inventor: 차현준

    Abstract: PURPOSE: By etching protective film selectively with laser beam, defect analysis of semiconductor is performed without any damage to metal wire. CONSTITUTION: An isolation film, MOS transistor, storage electrode, and capacitor are deposited on a substrate(10). After multi layers of a metal wire(12) is formed on an ILD(inter layer dielectrics) according to the use of a semiconductor chip, a protective film(14) covering a metal wire(12) is formed. A laser beam from a laser gun(16) etches the protective film(14) of the metal wire expected as a defective selectively. By controlling the wave and the output of the laser, the metal wire is not damaged at all.

    Abstract translation: 目的:通过激光束选择性地蚀刻保护膜,半导体的缺陷分析不会对金属线造成任何损害。 构成:在衬底(10)上沉积隔离膜,MOS晶体管,存储电极和电容器。 在根据半导体芯片的使用在ILD(层间电介质)上形成多层金属线(12)之后,形成覆盖金属线(12)的保护膜(14)。 来自激光枪(16)的激光束蚀刻预期为有缺陷的金属丝的保护膜(14)。 通过控制激光的波形和输出,金属丝根本就不会损坏。

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