公开(公告)号：KR1020000028109A

公开(公告)日：2000-05-25

申请号：KR1019980046246

申请日：1998-10-30

Applicant: 삼성전자주식회사

Inventor： 김경운 ,  허남성 ,  한종현

IPC: H01L21/02

Abstract: PURPOSE: A gas exhaust apparatus is provided to prevent exhaust gas from being accumulated in an equipment as temperature falls. CONSTITUTION: A gas exhaust pipe(210) has a gas inlet(221) connected with a gas exhaust pipe(210) and a gas outlet(222) connected with a flexible tube(230). Chemical source gas is injected into an inner tube(30) through a gas inlet hole(61) placed on the side of a flange(60) for being diffused on the surface of a wafer(10), which is accumulated on a quartz boat(20). The rest residual gas is exhausted through a gas outlet port(62) to flow into the gas exhaust pipe and a pump(220). The flexible tube functions as a pipe for passing the gas discharged from the pump while connecting its end portion with the gas outlet of the pump and the other end portion with an inlet(241) of a silencer(240). An adiabatic layer(231) in the flexible tube is coated to prevent the exhaust gas from losing heat. Therefore, the gas exhaust pipe prevents the ammonium chloride generated in the process of forming a nitride film from being accumulated in the flexible tube.

Abstract translation: 目的：提供排气装置，以防止废气在温度下降时积聚在设备中。 构成：排气管（210）具有与排气管（210）连接的气体入口（221）和与柔性管（230）连接的气体出口（222）。 化学源气体通过放置在凸缘（60）侧面的气体入口孔（61）注入到内管（30）中，用于扩散在晶片（10）的表面上，该晶片积聚在石英舟 （20）。 剩余的残余气体通过气体出口（62）排出，流入排气管和泵（220）。 柔性管作为用于使从泵的排气端部与泵的气体出口连通的气体通过的管道，另一端部具有消音器（240）的入口（241）。 涂覆柔性管中的绝热层（231）以防止废气损失热量。 因此，排气管防止在形成氮化膜的过程中产生的氯化铵积聚在柔性管中。

公开(公告)号：KR1020000018778A

公开(公告)日：2000-04-06

申请号：KR1019980036541

申请日：1998-09-04

Applicant: 삼성전자주식회사

Inventor： 한종현 ,  김경운 ,  허남성

IPC: H01L21/205

Abstract: PURPOSE: A CVD(chemical vapor deposition) apparatus is provided to improve a uniformity of thin films formed on a wafer by improving a structure of boat. CONSTITUTION: An apparatus comprises a pair of supporter(30) formed at both sides of a plurality of wafers(26), an upper load(32) and a lower load(34) arranged across to the supporters(30) and contacted to the edges of the wafer(26), and a boat(28) formed between the supporters(30) and connected between the upper load(32) and the lower load(34). The boat(28) further comprises a plurality of lower supporters(36) having different height each other, and the boat(28) is slopely loaded on the lower supporters(36).

Abstract translation: 目的：提供CVD（化学气相沉积）装置，通过改善船的结构来改善在晶片上形成的薄膜的均匀性。 构成：装置包括形成在多个晶片（26）的两侧的一对支撑件（30），跨过支撑件（30）布置并接触的上部负载（32）和下部负载（34） 晶片（26）的边缘和形成在支撑件（30）之间并连接在上部负载（32）和下部负载（34）之间的船形件（28）。 船（28）还包括具有彼此不同高度的多个下支撑件（36），船（28）倾斜地装载在下支撑件（36）上。

公开(公告)号：KR1019970062452A

公开(公告)日：1997-09-12

申请号：KR1019960004439

申请日：1996-02-24

Applicant: 삼성전자주식회사

Inventor： 국정호 ,  허남성

IPC: F16K31/126

Abstract: 본 발명은 벨로즈(bellows)를 갖춘 밸브에 관한 것으로, 본 발명에 따른 밸브는 벨로즈의 하부에 설치된 원판의 상면에 고정되고, 벨로즈 본체를 포위하도록 상기 벨로즈의 직경보다 큰 직경으로 형성되고, 밸브를 개방시키는 개방 위치에 있는 상기 벨로즈 본체의 길이와 동일한 높이를 가지는 원통형 커버와, 상기 원통형 커버의 상부에 상기 원통형 커버의 직경과 동일한 직경으로 형성된 O-링을 포함한다. 본 발명에 의하면, 반도체 제조 장치에 사용되는 밸브의 내부에 설치된 벨로즈의 외벽에 오염 입자가 흡착되는 것을 방지할 수 있으므로, 벨로즈의 수명을 연장시킬 수 있다.

公开(公告)号：KR1020000032443A

公开(公告)日：2000-06-15

申请号：KR1019980048897

申请日：1998-11-14

Applicant: 삼성전자주식회사

Inventor： 허남성 ,  한종현 ,  김경운

IPC: H01L21/22

Abstract: PURPOSE: An apparatus for elevating boats in a vertical diffusion furnace is provided for a powder nitride between an axis and a cap to be removed easily. CONSTITUTION: An apparatus for elevating boats in a vertical diffusion furnace includes a container(4) for a boat with a wafer, a parallel table(12), a cylindrical support(14), a plate coupled to the cylindrical support(14), an axis(18) penetrating a center of the plate, and a hat-like flange cap(20). The parallel table is located in the center of the container and supports the container. The cylindrical support is assembled vertically on the parallel table. The hat-like flange cap is assembled both at a terminal of the axis and on the plate. The flange cap is cut along with the axis for at least once to result in a couple(30) of flange caps. And a couple(36) of vertical flanges are bolted on the outside of the couple of flange caps to be separated easily.

Abstract translation: 目的：提供一种用于在立式扩散炉中提升船的装置，用于容易地移除轴和盖之间的粉末状氮化物。 构造：用于在垂直扩散炉中升降船的装置包括：具有晶片的船的容器（4），平行台（12），圆柱形支撑件（14），联接到圆柱形支撑件（14）的板， 穿过板的中心的轴线（18）和帽状的凸缘帽（20）。 平行台位于容器的中心并支撑容器。 圆柱形支撑件垂直组装在平行台上。 帽状法兰盖组装在轴的端子和板上。 法兰盖与轴一起切割至少一次以产生一对（30）的凸缘盖。 而一对（36）的垂直法兰螺栓固定在法兰盖的两侧，以便容易分离。