公开(公告)号：KR101364261B1

公开(公告)日：2014-02-17

申请号：KR1020130011849

申请日：2013-02-01

Applicant: 서강대학교산학협력단

Inventor： 윤경병 ,  이철수 ,  웬웬칸 ,  엄상아 ,  이경복

IPC: H01L31/18 ,  H01L31/042

CPC classification number: Y02E10/50 ,  H01L31/042 ,  H01L31/18

Abstract: An apparatus for automatically forming a micro bead substrate includes: a substrate fixing unit for fixing a substrate which has a predetermined pattern on its surface; a micro bead supply unit for supplying micro beads; a work unit for picking the micro bead provided by the micro bead supply unit and moving to a location which the substrate is located and performing removal of the remaining micro beads on the substrate except for the micro beads existing on the predetermined pattern in a process of rubbing operation for the surface of the substrate which has the predetermined pattern to flow the micro beads in and inserting the micro beads; a bead removal unit for removing the micro beads which are attached to the work unit to remove the micro beads remaining on the substrate except for the predetermined pattern; and a controller for controlling a transfer unit which transfers the work unit among the micro bead supply unit, fixing unit and micro bead removal unit, and operation of the work unit and transfer unit.

Abstract translation: 用于自动形成微珠基板的装置包括：基板固定单元，用于在其表面上固定具有预定图案的基板; 用于供应微珠的微珠供应单元; 工作单元，用于拾取由微珠供给单元提供的微珠并移动到基板所在的位置，并且除了存在于预定图案上的微珠之外，还除去基板上剩余的微珠， 具有预定图案的衬底的表面的摩擦操作以使微珠流过并插入微珠; 珠去除单元，用于去除附着到工件单元上的微珠，以去除除了预定图案之外的留在基板上的微珠; 以及控制器，用于控制在微珠供给单元，定影单元和微珠去除单元之间传送工作单元的传送单元以及工作单元和传送单元的操作。