公开(公告)号：KR100858982B1

公开(公告)日：2008-09-17

申请号：KR1020070073642

申请日：2007-07-23

Applicant: 서울과학기술대학교 산학협력단 ,  국민대학교산학협력단

Inventor： 김동환 ,  김영대

IPC: H01J37/26

Abstract: A scanning electron microscope having a unification control function is provided to control operations of components including a high voltage generator and an electron beam scanning unit by using digital signals. A scanning electron microscope includes an electron gun, an anode separated from the electron gun, a high voltage generator for applying a high voltage to the electron gun and the anode, an electron beam scanning unit for scanning an electron beam to a sample, and a detection unit for detecting secondary electrons reflected from the sample and converting the secondary electrons to electrical signals. The scanning electron microscope further includes a control panel(52) having a plurality of key input parts for operating the high voltage generator and the electron beam scanning unit, an analysis terminal(54) for receiving the electrical signals from the detection unit and displaying an image of the sample on a monitor, and a digital signal processor(58) for controlling operations of the high voltage generator and the electron beam scanning unit by processing drive signals of the high voltage generator and the electron beam scanning unit as digital signals.

Abstract translation: 提供具有统一控制功能的扫描电子显微镜，以通过使用数字信号来控制包括高压发生器和电子束扫描单元的部件的操作。 扫描电子显微镜包括电子枪，与电子枪分离的阳极，用于向电子枪和阳极施加高电压的高电压发生器，用于向样品扫描电子束的电子束扫描单元，以及 检测单元，用于检测从样品反射的二次电子，并将二次电子转换成电信号。 该扫描电子显微镜还包括具有用于操作高电压发生器和电子束扫描单元的多个键输入部分的控制面板（52），用于从检测单元接收电信号的分析终端（54） 监视器上的样本图像，以及用于通过处理高电压发生器和电子束扫描单元的驱动信号作为数字信号来控制高电压发生器和电子束扫描单元的操作的数字信号处理器（58）。