公开(公告)号：KR100663714B1

公开(公告)日：2007-01-03

申请号：KR1020050133293

申请日：2005-12-29

Applicant: 성균관대학교산학협력단

Inventor： 강대준 ,  신성진

IPC: C01G19/02 ,  C01G15/00 ,  C01G19/00 ,  B82B3/00

Abstract: A preparation method of ITO(indium tin oxide) synthesis composition is provided to apply the composition to ITO synthesis and ITO patterning processes and to derive formation of nano-scale structure through the ITO patterning and use of electron beam by using indium tert-butoxide and tin tert-butoxide as a precursor of the composition. The composition is produced by the steps of: forming first solution by mixing indium tert-butoxide, 1-benzoylacetone and methanol; forming second solution by mixing tin tert-butoxide, 1-benzolacetone and methanol; and blending the first solution and the second solution together. The first solution is obtained by admixing indium tert-butoxide and 1-benzoylacetone in 1:1 ratio, then adding methanol to the admixture. The second solution is obtained by admixing tin tert-butoxide and 1-benzoylacetone in 1:1 ration, then adding methanol to the admixture. All of the steps are conducted in a glove box with relative moisture of less than 5%.

Abstract translation: 提供ITO（铟锡氧化物）合成组合物的制备方法以将组合物应用于ITO合成和ITO图案化工艺，并通过ITO图案化和使用电子束通过使用叔丁醇铟形成纳米级结构 叔丁醇锡作为组合物的前体。 通过以下步骤制备组合物：通过混合叔丁醇铟，1-苯甲酰丙酮和甲醇形成第一溶液; 通过混合叔丁醇锡，1-苯并丙酮和甲醇形成第二溶液; 并将第一溶液和第二溶液混合在一起。 第一溶液通过以1:1的比例混合叔丁醇铟和1-苯甲酰丙酮，然后向混合物中加入甲醇而获得。 第二溶液通过以1:1配比混合叔丁醇锡和1-苯甲酰丙酮，然后向混合物中加入甲醇而获得。 所有步骤都在相对湿度小于5％的手套箱中进行。