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1.发明公开
公开(公告)号：KR1020170003401A
公开(公告)日：2017-01-09
申请号：KR1020160075745
申请日：2016-06-17
Applicant: 성균관대학교산학협력단
IPC: H01L21/02
Abstract: 도펀트의공간분포에있어서차원효과에의하여특성이조절되어가변적물정을갖는다기능성산화물구조체, 및상기다기능성산화물구조체를이용한산화물의특성조절방법에관한것이다.
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