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公开(公告)号:KR1020040091501A
公开(公告)日:2004-10-28
申请号:KR1020030025613
申请日:2003-04-22
Applicant: 송석호
Abstract: PURPOSE: A method for fabricating a three-dimensional photonic crystal structure using a spin-coating method is provided to form the three-dimensional photonic crystal structure by using silica balls of nano size. CONSTITUTION: A predetermined pattern is formed on a substrate by using photoresist. An etching process is performed on the substrate by using hydrofluoric acid. The photoresist is removed from the substrate in order to form a projection on the substrate. The substrate is fixed to a spin coater. Silica balls are moved to the outside by the centrifugal force while the colloid solution is dropped onto the substrate. The silica balls are stacked by the projection.
Abstract translation: 目的:提供使用旋涂法制造三维光子晶体结构的方法,以通过使用纳米尺寸的二氧化硅球形成三维光子晶体结构。 构成:通过使用光刻胶在衬底上形成预定图案。 通过使用氢氟酸在基板上进行蚀刻处理。 从衬底去除光致抗蚀剂以便在衬底上形成突起。 将基板固定在旋涂机上。 硅胶球通过离心力移动到外部,同时胶体溶液滴到基底上。 二氧化硅球通过突起堆叠。
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公开(公告)号:KR1020040094584A
公开(公告)日:2004-11-10
申请号:KR1020030028464
申请日:2003-05-03
Applicant: 송석호
IPC: C04B35/624
CPC classification number: C04B35/624 , C04B35/14 , C04B35/62685
Abstract: PURPOSE: A sol-gel process for preparing silica spheres is provided to obtain silica spheres having a uniform size which is used in constructing three-dimensional crystals, and to improve the reproducibility . CONSTITUTION: The sol-gel process for preparing silica spheres uses an order of adding additives different from the order currently used in conventional sol-gel processes to improve the reproducibility. Particularly, H2O and TEOS(tetraethoxysilane) are preliminarily added to ethanol and then the mixture is stirred for 10 minutes. Finally, NH4OH is added to the resultant mixture. In other words, the order of adding TEOS and NH4OH is reverse compared to conventional sol-gel processes.
Abstract translation: 目的:提供一种制备二氧化硅球体的溶胶 - 凝胶法,以获得用于构造三维晶体的具有均匀尺寸的二氧化硅球,并提高再现性。 构成:用于制备二氧化硅球体的溶胶 - 凝胶法使用添加与常规溶胶 - 凝胶法中目前使用的添加剂不同的添加剂来提高再现性。 特别地,将H 2 O和TEOS(四乙氧基硅烷)预先加入到乙醇中,然后将混合物搅拌10分钟。 最后,向所得混合物中加入NH 4 OH。 换句话说,与常规溶胶 - 凝胶法相比,添加TEOS和NH4OH的顺序是反向的。
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