Saved successfully
Save failed
Saved Successfully
Save Failed
公开(公告)号:KR102155951B1
公开(公告)日:2020-09-15
申请号:KR1020187029121
申请日:2017-03-10
Applicant: 아토테크더치랜드게엠베하
Inventor: 네오딘-기 , 바르트헬메스위르겐
IPC: H01L23/495 , H01L21/48 , H01L23/31 , C23C18/16 , C23C18/54 , C25D5/02 , C25D5/34