구리 퇴적물의 전기분해적 퇴적을 위한 소중합체 페나지늄화합물의 혼합물 및 산조
    2.
    发明公开
    구리 퇴적물의 전기분해적 퇴적을 위한 소중합체 페나지늄화합물의 혼합물 및 산조 有权
    用于电沉积铜沉积的低分子化合物和酸浴的混合物

    公开(公告)号:KR1020050085841A

    公开(公告)日:2005-08-29

    申请号:KR1020057011603

    申请日:2003-12-09

    CPC classification number: C25D3/38 C25D7/12 H01L21/2885 H05K3/423

    Abstract: For the reproducible manufacturing of particularly uniform and brilliant i.e., highly bright copper coatings that are leveled and ductile as well, a copper plating bath is utilized that contains as an additive a mixture of oligomeric phenazinium compounds. The mixture contains at least one phenazinium compound selected from the group comprising compounds containing two monomeric units and compounds containing three monomeric units having the general chemical formulae and set forth in the patent claims and in the specification as well as further oligomeric phenazinium compounds.

    Abstract translation: 对于特别均匀和辉煌的可重复制造,即均匀且延性良好的高亮度铜涂层,使用含有低聚菲嗪化合物的混合物作为添加剂的镀铜浴。 该混合物含有至少一种选自含有两个单体单元的化合物的化合物,以及含有三个具有一般化学式的单体单元并在专利权利要求书和说明书中阐述的化合物以及其它低聚苯并嗪化合物。

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