굴절률 분포 측정 방법 및 장치
    1.
    发明授权
    굴절률 분포 측정 방법 및 장치 有权
    用于测量折射率指标的方法和装置

    公开(公告)号:KR101118274B1

    公开(公告)日:2012-06-12

    申请号:KR1020090128195

    申请日:2009-12-21

    Abstract: PURPOSE: A method and an apparatus for measuring refractive index profile are provided to measure refractive index profile in a non-destructive manner excluding cutting and grinding of an object being measured. CONSTITUTION: An apparatus for measuring refractive index profile comprises a light source unit(110), a diffraction grating, a diffraction pattern recording unit(160), and an operation unit(170). The light source unit irradiates collimated light to enter the diffraction grating. The diffraction pattern recording unit records a diffraction pattern which is formed by the diffraction beam from the diffraction grating passes through an object having a non-uniform refractive index. The operation unit computes the refraction index profile of the object from the interval between the zeroth peak position and the first peak position.

    3차원 형상 측정 장치
    2.
    发明公开
    3차원 형상 측정 장치 有权
    用于测量三维形状的装置

    公开(公告)号:KR1020100094185A

    公开(公告)日:2010-08-26

    申请号:KR1020090013497

    申请日:2009-02-18

    Abstract: PURPOSE: A 3D geometry-measuring apparatus is provided to precisely measure a three dimensional shape without physical operation. CONSTITUTION: A 3D geometry-measuring apparatus comprises a light source(50), a beam split unit(57), a first lattice(64), a second lattice(72), a third lattice(84), a fourth lattice(90), a light synthesizing unit(65) and an image sensing unit. The first lattice is arranged on the first route. The second lattice is arranged on the second path. The third lattice is arranged on the third route. The fourth lattice is arranged on the fourth route. The photosynthetic unit guides first wave length light, second wavelength light, third wavelength light and fourth wavelength light to the same route. The image sensing unit takes a lattice pattern image.

    Abstract translation: 目的:提供3D几何测量装置,以精确测量三维形状而不进行物理操作。 构造:3D几何测量装置包括光源(50),光束分离单元(57),第一晶格(64),第二晶格(72),第三晶格(84),第四晶格(90 ),光合成单元(65)和图像感测单元。 第一个格子排列在第一个路线上。 第二格子布置在第二路径上。 第三个格子排列在第三个路线上。 第四个格子被布置在第四个路线上。 光合单元将第一波长光,第二波长光,第三波长光和第四波长光引导到相同的路线。 图像感测单元获取格子图案图像。

    굴절률 분포 측정 방법 및 장치
    3.
    发明公开
    굴절률 분포 측정 방법 및 장치 有权
    用于测量折射率指标的方法和装置

    公开(公告)号:KR1020110071582A

    公开(公告)日:2011-06-29

    申请号:KR1020090128195

    申请日:2009-12-21

    Abstract: PURPOSE: A method and an apparatus for measuring refractive index profile are provided to measure refractive index profile in a non-destructive manner excluding cutting and grinding of an object being measured. CONSTITUTION: An apparatus for measuring refractive index profile comprises a light source unit(110), a diffraction grating, a diffraction pattern recording unit(160), and an operation unit(170). The light source unit irradiates collimated light to enter the diffraction grating. The diffraction pattern recording unit records a diffraction pattern which is formed by the diffraction beam from the diffraction grating passes through an object having a non-uniform refractive index. The operation unit computes the refraction index profile of the object from the interval between the zeroth peak position and the first peak position.

    Abstract translation: 目的:提供一种用于测量折射率分布的方法和装置,以非破坏性的方式测量折射率分布,不包括被测量物体的切割和研磨。 构成:用于测量折射率分布的装置包括光源单元(110),衍射光栅,衍射图案记录单元(160)和操作单元(170)。 光源单元照射准直光进入衍射光栅。 衍射图案记录单元记录由衍射光栅衍射光束形成的衍射图案通过具有不均匀折射率的物体。 操作单元从第零峰位置和第一峰位置之间的间隔计算物体的折射率分布。

    초고분해능 주사 광학 측정 장치
    4.
    发明授权
    초고분해능 주사 광학 측정 장치 有权
    具有超分辨率的扫描光学测量装置

    公开(公告)号:KR100978600B1

    公开(公告)日:2010-08-27

    申请号:KR1020070106744

    申请日:2007-10-23

    CPC classification number: G01Q60/22 G01N13/00

    Abstract: 초고분해능 주사 광학 측정 장치가 개시된다.
    개시된 주사 광학 측정 장치는, 광원; 상기 광원으로부터 조사된 광을 집속시키는 제1 렌즈; 상기 제1 렌즈 다음에 배치되는 제1 핀홀; 상기 제1 핀홀을 통과한 광을 발산시키는 제2 렌즈; 상기 제2 렌즈를 통과한 광을 주사하기 위한 주사 유닛; 상기 제2 렌즈와 주사 유닛 사이에 배치된 제1 빔스프리터; 상기 주사 유닛으로부터 나온 광을 제1 경로상에 배치되는 것으로 피검체를 스캐닝하기 위한 스캐닝 유닛; 상기 스캐닝 유닛을 통과한 광을 피검체에 집속하기 위한 대물 렌즈; 상기 피검체가 놓여지는 슬라이드; 상기 광원에서 조사된 후 상기 피검체를 통과한 광을 반사시키는 광학 탐침; 상기 스캐닝 유닛과 대물 렌즈 사이에 배치된 제2 빔스프리터; 상기 피검체와 상기 광학 탐침에서 반사되어 상기 제1 빔스프리터를 경유한 광을 검출하기 위한 제1 광검출기; 상기 제1 빔스프리터와 제1 광검출기 사이에 배치된 제2 핀홀; 상기 피검체와 상기 광학 탐침에서 반사되어 상기 제2 빔스프리터를 경유한 광을 검출하기 위한 제2 광검출기;를 포함한다.

    3차원 형상 측정 장치
    5.
    发明公开
    3차원 형상 측정 장치 有权
    用于测量三维形状的装置

    公开(公告)号:KR1020100094184A

    公开(公告)日:2010-08-26

    申请号:KR1020090013496

    申请日:2009-02-18

    Abstract: PURPOSE: A 3D geometry-measuring apparatus is provided to rapidly measure three dimensional shape of a target by simultaneously processing phase transition. CONSTITUTION: A 3D geometry-measuring apparatus comprises a light source(50), a beam split unit(51), a dichotic prism, a first lattice(61), a second lattice(62), a third lattice(63) and an image sensing unit(80). The beam split unit disunites white light, from the light source, into first wave length light, second wavelength light and third wavelength light. The dichotic prism guides the first wave length light, the second wavelength light, and the third wavelength light to the same route. The first lattice is arranged on the first route. The second lattice is arranged on the second path. The third lattice is arranged on the third route. The image sensing part is formed with the light passing through the dichotic prism in a subject. The image sensing part takes a photograph of the lattice pattern image formed in the subject. The beam split unit comprises a first dichotic filter, a second dichotic filter and a third dichotic filter.

    Abstract translation: 目的:提供3D几何测量装置,通过同时处理相变来快速测量目标的三维形状。 构成:3D几何测量装置包括光源(50),光束分离单元(51),双折射棱镜,第一格子(61),第二格子(62),第三格子(63)和 图像感测单元(80)。 光束分离单元将来自光源的白光分为第一波长光,第二波长光和第三波长光。 双折射棱镜将第一波长光,第二波长光和第三波长光引导到相同的路线。 第一个格子排列在第一个路线上。 第二格子布置在第二路径上。 第三个格子排列在第三个路线上。 图像感测部分形成有通过被摄体中的双焦棱镜的光。 图像感测部拍摄在被摄体中形成的格子图案图像的照片。 光束分离单元包括第一透光滤光器,第二透光滤光片和第三双色滤光片。

    3차원 형상 측정 장치
    6.
    发明授权

    公开(公告)号:KR101078876B1

    公开(公告)日:2011-11-01

    申请号:KR1020090013496

    申请日:2009-02-18

    Abstract: 개시된측정장치는, 광원; 상기광원으로부터조사된백색광을제1경로로진행하는제1파장광, 제2경로로진행하는제2파장광, 및제3경로로진행하는제3파장광으로분리시키는광 분리유닛; 상기제1파장광, 제2파장광, 제3파장광을동일한경로로진행하도록하는다이크로익프리즘; 상기제1경로상에배치된제1격자; 상기제2경로상에배치된제2격자; 상기제3경로상에배치된제3격자; 및상기다이크로익프리즘을통과한광에의해피검체에형성된격자무늬영상을촬영하는영상감지부를포함하고, 상기제1격자, 제2격자및 제3격자가격자주기가같고, 상기제2격자의격자배열이상기제1격자에비해 1/3 주기만큼쉬프트되고, 상기제3격자의격자배열이상기제2격자에비해 1/3 주기만큼쉬프트되어있다.

    초고분해능 주사 광학 측정 장치
    7.
    发明公开
    초고분해능 주사 광학 측정 장치 有权
    扫描光学测量装置具有超分辨率

    公开(公告)号:KR1020090041171A

    公开(公告)日:2009-04-28

    申请号:KR1020070106744

    申请日:2007-10-23

    CPC classification number: G01Q60/22 G01N13/00

    Abstract: A scanning optical measurement apparatus having super resolution is provided to observe desired local area with super resolution by scanning the relatively wide area of a checked object at high speed. A scanning optical measurement apparatus having super resolution comprises: a first pinhole(7) arranged next to a first lens(5); a second lens(9) emitting the light passing through the first pinhole; a scanning unit scanning the light passed through the second lens; a first beam splitter(30) arranged between the second lens and the scanning unit; a scanning unit(34) arranging the light, emitted from the scanning unit, to a first route; an objective lens(18) focusing the light passing through the scanning unit on a checked object; an optical probe(22) reflecting the light passed through the checked object; a second beam splitter(16) arranged between the scanning unit and the objective lens; and a first optical detector(49) detecting the light which is reflected in the checked object and the optical probe and is passed through the first beam splitter.

    Abstract translation: 提供具有超分辨率的扫描光学测量装置,以通过以高速扫描被检查对象的相对宽的区域来以超分辨率观察所需的局部区域。 具有超分辨率的扫描光学测量装置包括:布置在第一透镜(5)旁边的第一针孔(7); 发射穿过第一针孔的光的第二透镜(9); 扫描单元扫描通过第二透镜的光; 布置在第二透镜和扫描单元之间的第一分束器(30) 将从扫描单元发射的光排列到第一路径的扫描单元(34) 将通过扫描单元的光聚焦在被检查对象上的物镜(18) 反射穿过被检查物体的光的光学探针(22); 布置在扫描单元和物镜之间的第二分束器(16); 以及第一光学检测器(49),其检测被检查物体和光学探针中反射并穿过第一分束器的光。

    3차원 형상 측정 장치
    8.
    发明授权
    3차원 형상 측정 장치 有权
    三维形状测量装置

    公开(公告)号:KR101078877B1

    公开(公告)日:2011-11-01

    申请号:KR1020090013497

    申请日:2009-02-18

    Abstract: 개시된측정장치는, 제1파장광, 제2파장광, 제3파장광, 및제4파장광을각각제1격자, 제2격자, 제3격자, 및제4격자를통해투과시켜피검체에격자무늬가생성되도록하고, 격자무늬영상을영상감지부에서촬영하여위상천이된간섭무늬를얻고, 이간섭무늬로부터 3차원형상을측정한다.

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