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公开(公告)号：KR101967446B1
公开(公告)日：2019-04-09
申请号：KR1020170114683
申请日：2017-09-07
Applicant: 재단법인대구경북과학기술원
IPC: H01L29/788 , H01L29/73 , H01L29/78 , H01L29/66
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