公开(公告)号：KR101294359B1

公开(公告)日：2013-08-08

申请号：KR1020120065601

申请日：2012-06-19

Applicant: 전남대학교산학협력단

Inventor： 이동원 ,  정영매 ,  박종성

IPC: H01L41/04

CPC classification number: H01L41/1138 ,  C04B35/491 ,  H01L41/1871 ,  H01L41/1873 ,  H01L41/1876

Abstract: PURPOSE: A piezoelectric thin film structure of a both-end fixing type is provided to increase the generation efficiency of a piezoelectric element by forming a both-end supporting beam on the end of a fixing terminal of the piezoelectric element. CONSTITUTION: A piezoelectric element (110) is composed of a cantilever. One end of the cantilever is fixed. The other end of the cantilever is not supported. A both-end supporting beam (120) is formed on the upper side of a piezoelectric thin film structure which is separated from one side of the piezoelectric element.

Abstract translation: 目的：提供两端固定型的压电薄膜结构，以通过在压电元件的固定端子的端部上形成两端支撑梁来提高压电元件的发电效率。 构成：压电元件（110）由悬臂组成。 悬臂的一端是固定的。 不支持悬臂的另一端。 在从压电元件的一侧分离的压电薄膜结构的上侧形成有两端支撑梁（120）。