公开(公告)号：KR101102697B1

公开(公告)日：2012-01-05

申请号：KR1020100099979

申请日：2010-10-13

Applicant: 전북대학교산학협력단

Inventor： 양오봉 ,  이동헌 ,  곽도환 ,  정현진 ,  오대웅 ,  이문선

IPC: C02F11/14 ,  C02F1/38 ,  B01D11/04 ,  C02F9/00

CPC classification number: C02F11/14 ,  B01D11/04 ,  C02F1/38 ,  C02F9/00

Abstract: PURPOSE: A method for separating silicon and silicon carbide from waste sludge generated from a silicon wafer manufacturing process is provided to effectively implement a separating process using the specific gravity difference of the silicon and the silicon carbide. CONSTITUTION: The liquid part of waste sludge is dissolved in an organic solvent. The resultant is first centrifuged to be separated into a liquid part and a solid part. The solid part is treated with an acid solution in order to minimize the contents of organic materials, metals, and impurities. A heavy-liquid solution is mixed with the acid solution treated solution and is centrifuged a second time. The acid solution is based on one or more selected from a group including sulfuric acid, hydrochloric acid, nitric acid, phosphoric acid, or a mixture of the same.

Abstract translation: 目的：提供一种从硅晶片制造工艺中分离硅和碳化硅与废污泥的方法，以有效地实现使用硅和碳化硅的比重差的分离过程。 构成：将废液中的液体部分溶解在有机溶剂中。 将所得物首先离心分离成液体部分和固体部分。 用酸溶液处理固体部分，以使有机材料，金属和杂质的含量最小化。 将重液体溶液与酸溶液处理的溶液混合并再次离心。 酸溶液基于选自硫酸，盐酸，硝酸，磷酸或其混合物中的一种或多种。