公开(公告)号：KR1020090093098A

公开(公告)日：2009-09-02

申请号：KR1020080018436

申请日：2008-02-28

Applicant: 전북대학교산학협력단

Inventor： 임연호 ,  조송이 ,  라현욱 ,  허민

IPC: B82B3/00 ,  B82Y40/00

CPC classification number: B82B3/0038 ,  B82Y15/00 ,  B82Y40/00 ,  C25D13/16 ,  C25D15/00

Abstract: A method for manufacturing nanowire and a nanowire hydrogen sensor is provided to produce a high-sensitivity hydrogen sensor to respond to the wide range of hydrogen concentration when palladium is used as a metal material. A method for manufacturing nanowire and a nanowire hydrogen sensor comprises: a first step of depositing an insulating layer(2) on a substrate(1); a second step of forming metal electrodes(3) on the insulating layer; a third step of forming a raw material layer(5) for nanowire on the metal electrodes; and a fourth step of applying high frequency alternating current power to the metal electrodes so as to form nanowire(6). In the third step, a raw material-containing solution is supplied between the metal electrodes and then the DC power is applied to it.

Abstract translation: 提供了制造纳米线和纳米线氢传感器的方法，以产生高灵敏度的氢传感器，以便在钯用作金属材料时响应宽范围的氢浓度。 一种制造纳米线和纳米线氢传感器的方法，包括：在衬底（1）上沉积绝缘层（2）的第一步骤; 在绝缘层上形成金属电极（3）的第二步骤; 在金属电极上形成用于纳米线的原料层（5）的第三步骤; 以及向金属电极施加高频交流电力以形成纳米线（6）的第四步骤。 在第三步骤中，在金属电极之间提供含原料的溶液，然后施加直流电力。