마이크로 압전 엑츄에이터를 이용한 미세 광 스위치
    1.
    发明公开
    마이크로 압전 엑츄에이터를 이용한 미세 광 스위치 失效
    微型光电开关使用微型压电致动器

    公开(公告)号:KR1020030083929A

    公开(公告)日:2003-11-01

    申请号:KR1020020022331

    申请日:2002-04-23

    Abstract: PURPOSE: A micro optical switch using a micro piezoelectric actuator is provided, which enables to obtain information as to driving range of a driving actuator with a sensing actuator, and control a mirror accurately with the above information, and perform a repetitive driving. CONSTITUTION: The micro optical switch comprises a supporting part(10), and a supporting plate(48) floated by being connected to the above supporting part. The first - fourth actuator(101,102,103,104) are formed on the supporting plate respectively, and includes a piezoelectric capacitor respectively. And a mirror(50) is formed on the upper part of the supporting plate, and has a movement displacement by driving at least a pair of actuators among the above four actuators.

    Abstract translation: 目的:提供一种使用微型压电致动器的微型光学开关,其能够获得关于具有感测致动器的驱动致动器的驱动范围的信息,并且利用上述信息准确地控制镜子,并且执行重复驱动。 构成:微型光学开关包括支撑部分(10)和通过连接到上述支撑部分而浮动的支撑板(48)。 第一 - 第四致动器(101,102,103,104)分别形成在支撑板上,并且分别包括压电电容器。 并且在支撑板的上部形成有反射镜(50),并且通过在上述四个致动器中驱动至少一对致动器而具有移动位移。

    마이크로 압전 엑츄에이터를 이용한 미세 광 스위치
    2.
    发明授权
    마이크로 압전 엑츄에이터를 이용한 미세 광 스위치 失效
    마이크로압전엑츄에이터를이용한미세광스위치

    公开(公告)号:KR100453973B1

    公开(公告)日:2004-10-20

    申请号:KR1020020022331

    申请日:2002-04-23

    Abstract: PURPOSE: A micro optical switch using a micro piezoelectric actuator is provided, which enables to obtain information as to driving range of a driving actuator with a sensing actuator, and control a mirror accurately with the above information, and perform a repetitive driving. CONSTITUTION: The micro optical switch comprises a supporting part(10), and a supporting plate(48) floated by being connected to the above supporting part. The first - fourth actuator(101,102,103,104) are formed on the supporting plate respectively, and includes a piezoelectric capacitor respectively. And a mirror(50) is formed on the upper part of the supporting plate, and has a movement displacement by driving at least a pair of actuators among the above four actuators.

    Abstract translation: 目的:提供一种使用微型压电致动器的微型光学开关,其能够利用感测致动器获得关于驱动致动器的驱动范围的信息,并且利用上述信息精确地控制镜子,并且执行重复驱动。 构成:微型光开关包括支撑部分(10)和通过连接到上述支撑部分而浮动的支撑板(48)。 第一至第四致动器(101,102,103,104)分别形成在支撑板上,并且分别包括压电电容器。 并且在支撑板的上部形成有镜子(50),并通过驱动上述四个致动器中的至少一对致动器而具有移动位移。

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