公开(公告)号：KR1020080049722A

公开(公告)日：2008-06-04

申请号：KR1020087004880

申请日：2006-07-31

Applicant: 텍사스 인스트루먼츠 인코포레이티드

Inventor： 츄헨리씨. ,  공쿠일링

IPC: G02B26/08

CPC classification number: G02B26/0841 ,  B81B2201/04 ,  B81C1/00301 ,  G02B6/3518 ,  G09G3/346

Abstract: According to one embodiment of the invention a micro-mirror element (400) comprises a first address portion, a second address portion, and one or more address vias (424). The first address portion comprises a plurality of address pads (410) distributed in a first layer (420) of the micro-mirror element. The micro-mirror element has a first side and a second side and at least two of the plurality of address pads are distributed on the first side. The second address portion comprises a plurality of address electrodes (460) distributed in a second layer (450) of the micro-mirror element. The one or more address vias are operable to conductively couple the first address portion to the second address portion for the transfer of an address voltage from the first address portion to the second address portion. The distribution of the address pads of the first address portion and the address electrodes of the second address portion causes an electrostatic force provided by the second address portion to be greater than an electrostatic force provided by the first address portion.

Abstract translation: 根据本发明的一个实施例，微镜元件（400）包括第一地址部分，第二地址部分和一个或多个地址通孔（424）。 第一地址部分包括分布在微镜元件的第一层（420）中的多个地址焊盘（410）。 微镜元件具有第一侧和第二侧，并且多个地址焊盘中的至少两个分配在第一侧上。 第二地址部分包括分布在微镜元件的第二层（450）中的多个地址电极（460）。 一个或多个地址通孔可操作以将第一地址部分导电地耦合到第二地址部分，以将地址电压从第一地址部分传送到第二地址部分。 第一地址部分的地址焊盘和第二地址部分的寻址电极的分布导致由第二地址部分提供的静电力大于由第一地址部分提供的静电力。