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公开(公告)号：KR101952154B1
公开(公告)日：2019-02-26
申请号：KR1020170122461
申请日：2017-09-22
Applicant: 포항공과대학교 산학협력단
IPC: C25B9/00 , C25B1/04 , C25B9/04 , C25B11/04 , H01L31/0224 , H01L31/0352 , H01L31/05 , H01L31/18
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