수직 배열된 나노튜브의 제조방법, 센서구조의 제조방법 및 이에 의해 제조된 센서소자
    2.
    发明公开
    수직 배열된 나노튜브의 제조방법, 센서구조의 제조방법 및 이에 의해 제조된 센서소자 有权
    垂直对准的纳米管和传感器结构的制造方法及其制造的传感器元件

    公开(公告)号:KR1020110007814A

    公开(公告)日:2011-01-25

    申请号:KR1020090065446

    申请日:2009-07-17

    CPC classification number: H01L21/02554 H01L21/0262 H01L21/02639

    Abstract: PURPOSE: A method for manufacturing vertically aligned nanotubes is provided to obtain excellent performance at high temperature. CONSTITUTION: A method for manufacturing vertically aligned nanotubes comprises: a step of forming a polymer film on a substrate; a step of forming an AAO mask with pore structure on the film; a step of transferring the pore structure of the AAO mask to the polymer film by etching process; a step of removing the AAO mask; a step of forming a thin film on a polymer template; and a step of performing thermal decomposition to remove the polymer template.

    Abstract translation: 目的:提供一种制造垂直排列的纳米管的方法,以在高温下获得优异的性能。 构成:用于制造垂直取向的纳米管的方法包括:在基板上形成聚合物膜的步骤; 在膜上形成孔结构的AAO掩模的步骤; 通过蚀刻工艺将AAO掩模的孔结构转移到聚合物膜的步骤; 去除AAO面膜的步骤; 在聚合物模板上形成薄膜的步骤; 以及进行热分解以除去聚合物模板的步骤。

    멤브레인과 그 제조 방법
    5.
    发明公开
    멤브레인과 그 제조 방법 有权
    膜及其制造方法

    公开(公告)号:KR1020130018020A

    公开(公告)日:2013-02-20

    申请号:KR1020110080828

    申请日:2011-08-12

    Abstract: PURPOSE: A manufacturing method of membrane is provided to form nanopores necessary for DNA analysis by introducing specific functional group on a wall of nanopores. CONSTITUTION: A membrane comprises a supporting member(100) and a polymer layer(200). The polymer layer is located above the supporting member, and comprises multiple nanopores(80). The multiple nanopores have inner walls, and the walls are comprised of polymer material of `end substituted with functional group` block structure. The functional group may be one of -COOH, -NH2, and -SH. The block structure of polymer material may be PMMA block(60). The membrane manufacturing method comprises the following steps. The alignment layer is formed into PS-ran-PMMA on the substrate including the sacrificing layer. The solution including PS-b-PMMA-diCOOH is applied on the alignment layer to form the polymer layer. The polymer layer is dipped in the acetic acid to form multiple nanopores on the polymer layer with `PMMA block as inner wall.

    Abstract translation: 目的:提供膜的制造方法,通过在纳米孔的壁上引入特定的官能团来形成DNA分析所需的纳米孔。 构成:膜包括支撑构件(100)和聚合物层(200)。 聚合物层位于支撑构件上方,并且包括多个纳米孔(80)。 多个纳米孔具有内壁,并且壁由末端被官能团阻挡结构取代的聚合物材料组成。 官能团可以是-COOH,-NH2和-SH之一。 聚合物材料的嵌段结构可以是PMMA嵌段(60)。 膜制造方法包括以下步骤。 取向层在包括牺牲层的基板上形成PS-ran-PMMA。 将包含PS-b-PMMA-diCOOH的溶液施加在取向层上以形成聚合物层。 将聚合物层浸入乙酸中以在PMMA嵌段作为内壁的聚合物层上形成多个纳米孔。

    전기 자극에 반응하는 기공막 및 기공막 형성방법
    6.
    发明公开
    전기 자극에 반응하는 기공막 및 기공막 형성방법 有权
    针对电刺激的纳米膜及其制造方法

    公开(公告)号:KR1020130002804A

    公开(公告)日:2013-01-08

    申请号:KR1020110063990

    申请日:2011-06-29

    Abstract: PURPOSE: A porous membrane which responds to electric stimulation and is able to control flow rate is provided to control the size of pores and the thickness of the membrane. CONSTITUTION: A porous membrane comprises a support layer(10) with a same thickness having a plurality pores(11) and an electric reaction layer(20) which is combined with the circumference of a pore inlet. The support layer is formed of anodized aluminum. The electric reaction layer comprise an electrode layer(21) and a conductive polymer layer(22). The conductive polymer layer contains conductive polymers and dopant. The conductive polymer layer is formed by electropolymerization of polypyrrole and dodecylbenzenesulfonate anion.

    Abstract translation: 目的:提供响应于电刺激并且能够控制流速的多孔膜以控制孔的尺寸和膜的厚度。 构成:多孔膜包括具有多孔(11)的相同厚度的支撑层(10)和与孔入口周长结合的电反应层(20)。 支撑层由阳极氧化铝形成。 电反应层包括电极层(21)和导电聚合物层(22)。 导电聚合物层含有导电聚合物和掺杂剂。 导电聚合物层通过聚吡咯和十二烷基苯磺酸盐阴离子的电聚合形成。

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