公开(公告)号：KR100448349B1

公开(公告)日：2004-09-10

申请号：KR1020010061927

申请日：2001-10-08

Applicant: 학교법인연세대학교

Inventor： 정광호 ,  김신철

IPC: H05B33/10

Abstract: PURPOSE: A method for manufacturing a substrate structure having an inserted electrode for a flat display is provided to maintain a flat surface even when the thickness of the electrode increases, adjust protruded degree of the electrode, reduce voltage drop due to electrode lines, and increase forward luminescence. CONSTITUTION: A substrate structure for a flat display is manufactured by inserting an electrode into the substrate. At a first step(S1), the substrate is cleaned. At a second step(S2), photoresist is applied on the substrate. At a third step(S3), a mask of a pattern is disposed on the photoresist. At a fourth step(S4), the masked surface is exposed and developed. At a fifth step(S5), unnecessary photoresist is removed. At a sixth step(S6), the area of the substrate corresponding to the electrode is etched for inserting the electrodes. At a seventh step(S7), the electrode is formed at the etched area of the substrate. At an eighth step(S8), remaining photoresist is removed. An insulating film is formed between the first step(S1) and the second step(S2).

Abstract translation: 目的：提供一种用于制造具有用于平板显示器的插入电极的基板结构的方法，以即使当电极的厚度增加时也保持平坦表面，调节电极的突出程度，降低由于电极线引起的电压降并增加 正向发光。 构成：用于平面显示器的基板结构是通过将电极插入基板而制造的。 在第一步骤（S1）中，清洁衬底。 在第二步骤（S2）中，将光致抗蚀剂施加在基板上。 在第三步骤（S3）中，图案的掩模设置在光致抗蚀剂上。 在第四步骤（S4）中，掩模表面被曝光并显影。 在第五步骤（S5）中，去除不必要的光致抗蚀剂。 在第六步骤（S6）中，蚀刻对应于电极的基板的区域以插入电极。 在第七步骤（S7）中，电极形成在基板的蚀刻区域处。 在第八步骤（S8）中，去除剩余的光致抗蚀剂。 在第一步骤（S1）和第二步骤（S2）之间形成绝缘膜。

公开(公告)号：KR1020020028805A

公开(公告)日：2002-04-17

申请号：KR1020010061927

申请日：2001-10-08

Applicant: 학교법인연세대학교

Inventor： 정광호 ,  김신철

IPC: H05B33/10

CPC classification number: H01L51/0017 ,  H01L51/0021

Abstract: PURPOSE: A method for manufacturing a substrate structure having an inserted electrode for a flat display is provided to maintain a flat surface even when the thickness of the electrode increases, adjust protruded degree of the electrode, reduce voltage drop due to electrode lines, and increase forward luminescence. CONSTITUTION: A substrate structure for a flat display is manufactured by inserting an electrode into the substrate. At a first step(S1), the substrate is cleaned. At a second step(S2), photoresist is applied on the substrate. At a third step(S3), a mask of a pattern is disposed on the photoresist. At a fourth step(S4), the masked surface is exposed and developed. At a fifth step(S5), unnecessary photoresist is removed. At a sixth step(S6), the area of the substrate corresponding to the electrode is etched for inserting the electrodes. At a seventh step(S7), the electrode is formed at the etched area of the substrate. At an eighth step(S8), remaining photoresist is removed. An insulating film is formed between the first step(S1) and the second step(S2).

Abstract translation: 目的：提供一种用于制造具有用于平面显示器的插入电极的基板结构的方法，以便即使当电极的厚度增加时也保持平坦表面，调节电极的突出度，减少由于电极线引起的电压降，并且增加 正向发光。 构成：通过将电极插入基板来制造用于平板显示器的基板结构。 在第一步骤（S1）中，清洁基底。 在第二步骤（S2）中，将光刻胶施加在基板上。 在第三步骤（S3）中，在光致抗蚀剂上设置图案的掩模。 在第四步骤（S4）中，将掩蔽的表面曝光和显影。 在第五步骤（S5）中，除去不需要的光致抗蚀剂。 在第六步骤（S6）中，蚀刻与电极相对应的衬底的面积以插入电极。 在第七步（S7）中，电极形成在基板的蚀刻区域。 在第八步骤（S8）中，除去剩余的光致抗蚀剂。 在第一步骤（S1）和第二步骤（S2）之间形成绝缘膜。