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公开(公告)号：KR1020010104157A
公开(公告)日：2001-11-24
申请号：KR1020000025622
申请日：2000-05-13
Applicant: 한국과학기술연구원
IPC: C04B41/81 , H01L41/187
CPC classification number: C23C18/06 , C23C18/1208 , C23C18/1254
Abstract: 본 발명은 스크린 프린팅에 의한 고밀도 세라믹후막 제조방법에 관한 것으로, 유기 바인더 및 용제로 구성된 비이클을 제조하고, 상기 비이클에 세라믹 분말을 분산시켜 페이스트를 제조하고, 상기 페이스트로 스크린 프린팅법에 의해 일정한 두께의 후막을 프린팅하고, 프린팅된 후막을 건조한 후 유기바인더를 제거하고, 프린팅된 후막 표면에 졸 또는 졸과 유사한 용액을 도포하여 상기 후막으로 스며들도록 함침시키고, 상기 후막을 스피닝하여 여분의 졸 또는 졸과 유사한 용액을 제거하고, 상기 후막을 건조하여 중간 열처리를 하고, 상기 후막을 소결하는 단계를 포함하여 이루어지는 스크린 프린팅에 의한 고밀도 세라믹후막 제조방법을 제공한다. 본 발명에 의하면 패터닝 공정이 필요없이 기존의 스크린 프린팅 방법을 이용하여 저온에서 보다 치밀한 세라믹 후막을 원하는 패턴 크기로 제조하는 것이 가능하다. 따라서 저온소결 및 후막의 치밀화로 인하여 압전 소자및 초전 소자 등의 마이크로 디바이스 제조에 유용하게 이용될 수 있다.
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公开(公告)号：KR100450262B1
公开(公告)日：2004-09-30
申请号：KR1020010047464
申请日：2001-08-07
Applicant: 한국과학기술연구원
IPC: B81B7/02
Abstract: PURPOSE: A high sensitivity micro cantilever sensor and a method for manufacturing the same are provided to reduce the size of a system by sensing an electric signal and obtain prompt response to sensing. CONSTITUTION: A high sensitivity micro cantilever sensor includes a cantilever, an upper substrate formed of one piezoelectric cell at the upper surface of the cantilever and the other piezoelectric cell at the lower surface of the cantilever, wherein the piezoelectric cells include a piezoelectric film(62) and electrodes(61,63) formed at the upper and lower surfaces of the piezoelectric film, a lower substrate(32) having a cavity(34) in regular depth, wherein the piezoelectric cell lower surface of the upper substrate is adhered to the surface of the lower substrate in which the cavity is formed.
Abstract translation: 目的：提供一种高灵敏度微悬臂梁传感器及其制造方法，以通过感测电信号来减小系统的尺寸，并对感测获得及时响应。 一种高灵敏度微悬臂梁传感器，包括悬臂，由悬臂上表面上的一个压电单元和悬臂下表面上的另一个压电单元形成的上基板，其中压电单元包括压电膜（62 ）和在压电薄膜的上下表面形成的电极（61,63），具有规则深度的空腔（34）的下基板（32），其中上基板的压电单元下表面粘附到 下基板的形成有空腔的表面。
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公开(公告)号：KR100450261B1
公开(公告)日：2004-09-30
申请号：KR1020010047463
申请日：2001-08-07
Applicant: 한국과학기술연구원
IPC: B81B7/02
Abstract: PURPOSE: A high sensitivity micro cantilever sensor and a method for manufacturing the same are provided to reduce the size of a system by sensing an electric signal, speed up response rate by executing driving and sensing at the same time, and improve sensing property. CONSTITUTION: A high sensitivity micro cantilever sensor includes a cantilever, an upper substrate formed of one or two piezoelectric cells including a piezoelectric film(36) at the lower surface of the cantilever and electrodes(35,37) formed at the upper and lower surfaces of the piezoelectric film, a lower substrate(32) having a cavity(34) in regular depth, wherein the piezoelectric cell lower surface of the upper substrate is adhered to the surface of the lower substrate in which the cavity is formed.
Abstract translation: 目的：提供一种高灵敏度微悬臂梁传感器及其制造方法，以通过感测电信号来减小系统的尺寸，通过同时执行驱动和感测来加快响应速度，并且改善感测特性。 一种高灵敏度微悬臂梁传感器，包括悬臂，由一个或两个压电单元形成的上基板，该单元包括位于悬臂下表面的压电薄膜（36）和形成在上下表面的电极（35,37） 具有规则深度的空腔（34）的下基板（32），其中上基板的压电单元下表面粘附到其中形成空腔的下基板的表面。
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Patent Agency Ranking
公开(公告)号：KR1020030013130A
公开(公告)日：2003-02-14
申请号：KR1020010047464
申请日：2001-08-07
Applicant: 한국과학기술연구원
IPC: B81B7/02
CPC classification number: B81B7/02 , B81B3/0021 , B81B2201/014 , B81B2201/02 , B81B2203/0118 , B81C1/00134 , H01L41/22
Abstract: PURPOSE: A high sensitivity micro cantilever sensor and a method for manufacturing the same are provided to reduce the size of a system by sensing an electric signal and obtain prompt response to sensing. CONSTITUTION: A high sensitivity micro cantilever sensor includes a cantilever, an upper substrate formed of one piezoelectric cell at the upper surface of the cantilever and the other piezoelectric cell at the lower surface of the cantilever, wherein the piezoelectric cells include a piezoelectric film(62) and electrodes(61,63) formed at the upper and lower surfaces of the piezoelectric film, a lower substrate(32) having a cavity(34) in regular depth, wherein the piezoelectric cell lower surface of the upper substrate is adhered to the surface of the lower substrate in which the cavity is formed.
Abstract translation: 目的：提供高灵敏度微悬臂传感器及其制造方法，以通过感测电信号并获得对感测的迅速响应来减小系统的尺寸。 构成：高灵敏度微悬臂传感器包括悬臂，在悬臂的上表面由一个压电单元形成的上基板和在悬臂的下表面处的另一个压电单元，其中压电单元包括压电薄膜（62 ）和形成在压电膜的上表面和下表面的电极（61,63），具有规则深度的空腔（34）的下基板（32），其中上基板的压电单元下表面粘附到 形成空腔的下基板的表面。
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公开(公告)号：KR1020030013129A
公开(公告)日：2003-02-14
申请号：KR1020010047463
申请日：2001-08-07
Applicant: 한국과학기술연구원
IPC: B81B7/02
CPC classification number: B81B7/02 , B81B3/0021 , B81B2201/014 , B81B2201/02 , B81B2203/0118 , B81C1/00134 , H01L41/22
Abstract: PURPOSE: A high sensitivity micro cantilever sensor and a method for manufacturing the same are provided to reduce the size of a system by sensing an electric signal, speed up response rate by executing driving and sensing at the same time, and improve sensing property. CONSTITUTION: A high sensitivity micro cantilever sensor includes a cantilever, an upper substrate formed of one or two piezoelectric cells including a piezoelectric film(36) at the lower surface of the cantilever and electrodes(35,37) formed at the upper and lower surfaces of the piezoelectric film, a lower substrate(32) having a cavity(34) in regular depth, wherein the piezoelectric cell lower surface of the upper substrate is adhered to the surface of the lower substrate in which the cavity is formed.
Abstract translation: 目的：提供高灵敏度微悬臂传感器及其制造方法，以通过感测电信号来减小系统的尺寸，同时通过执行驱动和感测来加快响应速度，并提高感测特性。 构成：高灵敏度微悬臂传感器包括悬臂，由一个或两个压电单元形成的上基板，包括在悬臂的下表面处的压电膜（36）和形成在上表面和下表面的电极（35,37） ，具有规则深度的空腔（34）的下基板（32），其中上基板的压电单元下表面粘附到形成有空腔的下基板的表面。
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公开(公告)号：KR100420929B1
公开(公告)日：2004-03-02
申请号：KR1020010029272
申请日：2001-05-26
Applicant: 한국과학기술연구원
IPC: C04B35/491 , H01L41/187
CPC classification number: H01L41/43 , H01L41/1876 , H01L41/314 , H04R17/00
Abstract: A method for manufacturing a high density piezoelectric thick film includes the steps of: mixing and dispersing piezoelectric material powder and a sol in a vehicle made of an organic binder and solvent, to fabricate a paste; printing the paste to a thickness of 5-100 micron on a substrate by a screen printing, to form a thick film; drying the thick film, and thermally treating the thick film.
Abstract translation: 一种制造高密度压电厚膜的方法包括以下步骤：将压电材料粉末和溶胶混合并分散在由有机粘合剂和溶剂制成的载体中以制造糊剂; 通过丝网印刷在基板上印刷厚度为5-100微米的膏体以形成厚膜; 干燥厚膜，然后热处理厚膜。
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公开(公告)号：KR100369118B1
公开(公告)日：2003-01-24
申请号：KR1020000025622
申请日：2000-05-13
Applicant: 한국과학기술연구원
IPC: C04B41/81 , H01L41/187
CPC classification number: C23C18/06 , C23C18/1208 , C23C18/1254
Abstract: A high density ceramic thick film is fabricated by providing vehicle comprising an organic binder and solvent, dispersing ceramic powders into the vehicle to be paste, forming the paste to thick film by screen printing, removing the organic binder from the film, applying sol or sol-like solution to the surface of the film so that the sol or sol-like solution can infiltrate into the film, removing remaining sol or sol-like solution from the surface of the film, drying and preheating the film, and sintering the film.
Abstract translation: 高密度陶瓷厚膜通过提供包含有机粘合剂和溶剂的载体，将陶瓷粉末分散到载体中以成为糊剂，通过丝网印刷将糊剂形成厚膜，从膜中除去有机粘合剂，施加溶胶或溶胶 的溶液，以便溶胶或溶胶状溶液可以渗透到膜中，从膜表面除去剩余的溶胶或溶胶状溶液，干燥并预热膜，并烧结膜。
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公开(公告)号：KR1020020090275A
公开(公告)日：2002-12-02
申请号：KR1020010029272
申请日：2001-05-26
Applicant: 한국과학기술연구원
IPC: C04B35/491 , H01L41/187
CPC classification number: H01L41/43 , H01L41/1876 , H01L41/314 , H04R17/00
Abstract: PURPOSE: A high density piezo film and its preparation method are provided, to obtain a piezo film which can be cured at a low temperature and has a low reactivity to the under substrate. CONSTITUTION: The high density piezo film comprises Pb(Zr, Ti)O3; and Pb(Cd1/2W1/2)O3 by the mass ratio of 1 : 0.01-0.20. The method comprises the steps of mixing and dispersing a piezo material powder and sol into a vehicle consisting of an organic binder and a solvent to prepare a paste; coating the paste onto a substrate by a thickness of 5-100 micrometers by screen printing to form a film; drying the film; and heating the film. Preferably the method comprises the steps of mixing and dispersing a piezo material powder and sol into a vehicle consisting of an organic binder and a solvent to prepare a paste; coating the paste onto a substrate by a thickness of 5-100 micrometers by screen printing to form a film; drying the film and removing the organic binder; coating a sol solution onto the film; removing the remaining sol solution by spinning; drying and heating the film; and re-heating the film. Preferably the organic binder is butoxyethoxyethyl acetate, polyvinyl butyral or polyethylene glycol.
Abstract translation: 目的：提供一种高密度压电薄膜及其制备方法，以获得能够在低温下固化并对底基材料具有低反应性的压电薄膜。 构成：高密度压电薄膜包括Pb（Zr，Ti）O3; 和Pb（Cd1 / 2W1 / 2）O3，质量比为1：0.01-0.20。 该方法包括将压电材料粉末和溶胶混合并分散到由有机粘合剂和溶剂组成的载体中以制备糊料的步骤; 通过丝网印刷将糊料涂覆在基材上5-100微米的厚度以形成膜; 烘干胶片; 并加热薄膜。 优选地，该方法包括将压电材料粉末和溶胶混合并分散到由有机粘合剂和溶剂组成的载体中以制备糊料的步骤; 通过丝网印刷将糊料涂覆在基材上5-100微米的厚度以形成膜; 干燥膜并除去有机粘合剂; 将溶胶溶液涂布在膜上; 通过旋转除去剩余的溶胶溶液; 干燥和加热薄膜; 并重新加热胶片。 优选地，有机粘合剂是乙酸丁氧基乙氧基乙酯，聚乙烯醇缩丁醛或聚乙二醇。
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