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公开(公告)号：KR101959378B1
公开(公告)日：2019-03-19
申请号：KR1020160109437
申请日：2016-08-26
Applicant: 한국과학기술연구원
IPC: H01L21/8238 , H01L27/092 , H01L29/205 , H01L29/778 , H01L21/8252 , H01L21/324
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