公开(公告)号：KR100070466B1

公开(公告)日：1994-01-28

申请号：KR1019910009530

申请日：1991-06-10

Applicant: 한국과학기술연구원

Inventor： 김낙중 ,  박수영 ,  이기풍

IPC: H01L21/469

公开(公告)号：KR1019930008860B1

公开(公告)日：1993-09-16

申请号：KR1019910009530

申请日：1991-06-10

Applicant: 한국과학기술연구원

Inventor： 김낙중 ,  박수영 ,  이기풍

IPC: H01L21/469

Abstract: The semiconductory organic thin film is mfd. by (a) putting a substrate on the lower electrode of the low temp. plasma polymn. appts., (b) pressure-reducing the total system contg. an organic monomer and argon induction vent to be at most 5 millitorr, (c) argon plasma-pretreating it to remove off an adsorbed moisture on the substrate surface, and to improve an adhesion of a plasma polymn. film and the substrate, (d) regulating a supply velocity of the monomer vapour, and stabilizing a pressure of the reactor, (e) glow-discharging the monomer, and plasma-polymerizing it to deposit the organic thin film on the substrate, and (f) heat-treating the polymn. film.

Abstract translation: 半导体有机薄膜是mfd。 通过（a）将衬底放置在低温的下电极上。 等离子体聚合物 （b）降低系统总体压力 有机单体和氩气导入孔最多为5毫托，（c）氩等离子体预处理以除去基底表面上的吸附水分，并改善等离子体聚合物的粘附。 （d）调节单体蒸气的供应速度，稳定反应器的压力，（e）使单体辉光放电，并使其等离子体聚合以将有机薄膜沉积在基板上，以及 （f）热处理聚合物。 电影。

公开(公告)号：KR1019930001356A

公开(公告)日：1993-01-16

申请号：KR1019910009530

申请日：1991-06-10

Applicant: 한국과학기술연구원

Inventor： 김낙중 ,  박수영 ,  이기풍

IPC: H01L21/469

Abstract: 내용 없음