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公开(公告)号：KR102045989B1
公开(公告)日：2019-11-18
申请号：KR1020180029553
申请日：2018-03-14
Applicant: 한국과학기술연구원
IPC: H01L21/8238 , H01L29/10 , H01L21/02 , H01L29/165 , H01L21/324
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