公开(公告)号：KR101418389B1

公开(公告)日：2014-07-11

申请号：KR1020130034638

申请日：2013-03-29

Applicant: 한국과학기술원

Inventor： 김용훈 ,  김한슬

IPC: G01N27/30 ,  G01N35/00 ,  C12Q1/68

CPC classification number: G01N27/307 ,  C01B32/158 ,  C01B32/182 ,  C12Q1/6813 ,  G01N2035/00118 ,  G01N2035/00158

Abstract: The present invention relates to a multi nanosensor and a method of manufacturing the same, and more specifically, to a multi nanosensor consisting of a plurality of nanosensors, in which intervals between electrodes being different, for measuring and comparing electrical signals of each nanosensor, thereby accurately detecting a target molecular; and a method of manufacturing the same. The multi nanosensor of the present invention has an advantage of accurately and quickly detecting a target molecular by of utilizing the sensors serving as nanopores which is required separately from the sensors in an existing device architecture of the related art and outputting signals of different kinds. The method of manufacturing the multi nanosensor according to the present invention has an advantage of easily adjusting the intervals of the electrodes in a unit of nanometer by overlapping layered materials of 2D thin film shape with a spacer.

Abstract translation: 多纳米传感器及其制造方法技术领域本发明涉及一种多纳米传感器及其制造方法，更具体地涉及由多个纳米传感器组成的多纳米传感器，其中电极间的间隔不同，用于测量和比较每个纳米传感器的电信号 准确检测目标分子; 及其制造方法。 本发明的多纳米传感器具有通过在现有技术的现有器件结构中利用与传感器分开需要的纳米孔的传感器，并且输出不同种类的信号，从而准确快速地检测目标分子的优点。 根据本发明的制造多纳米传感器的方法具有通过用间隔物重叠2D薄膜形状的层状材料容易地以纳米单位调节电极的间隔的优点。