公开(公告)号：KR100398309B1

公开(公告)日：2003-09-19

申请号：KR1020010008341

申请日：2001-02-20

Applicant: 한국과학기술원

Inventor： 윤의식 ,  윤광석

IPC: F04F99/00

CPC classification number: F04B43/06 ,  F04B17/00 ,  F04B43/043

Abstract: The present invention relates to a micropump which is driven by movement of a liquid drop based upon continuous electrowetting actuation. The continuous electrowetting means a phenomenon that the liquid drop moves as the surface tension of the liquid drop is electrically varied in succession. When a tube in which electrolyte and a liquid metal drop are inserted is applied with voltage having periodically changing polarity via metal electrodes, the surface tension of the liquid metal is varied so that the liquid metal drop reciprocates in the tube generating pressure or force, which is used as a driving force of the micropump. The micropump is operated in a low voltage and consumes a small amount of electric power.

Abstract translation: 本发明涉及一种基于连续电润湿致动的液滴驱动的微型泵。 连续电润湿意味着液滴随着液滴的表面张力连续电变化而移动的现象。 当插入电解质和液态金属滴的管通过金属电极施加具有周期性变化极性的电压时，液态金属的表面张力变化，使得液态金属滴在管内产生往复运动，产生压力或力， 被用作微型泵的驱动力。 微型泵在低电压下运行并消耗少量电力。

公开(公告)号：KR100608927B1

公开(公告)日：2006-08-08

申请号：KR1020050044570

申请日：2005-05-26

Applicant: 한국과학기술원

Inventor： 이형규 ,  윤광석 ,  윤의식

IPC: H01L27/04

Abstract: 커패시터용 전극층과 커패시터용 전극층의 제조방법, 그 전극층을 이용한 단위센서 및 그 단위센서를 이용한 촉각센서에 관하여 개시한다. 본 발명의 전극층은 폴리머 기판과; 폴리머 기판 상에 형성되는 전극 및 신호 전달선이 구비되는 것을 특징으로 한다. 본 발명의 단위센서는 상술한 전극층으로 이루어진 상부 및 하부 전극층과; 폴리머로 이루어진 스페이서층이 구비되는 것을 특징으로 한다. 본 발명에 의하면, 유연성이 뛰어나고 제조가 용이하며, 확장이 용이한 센서를 구현할 수 있다.
커패시터, 전극층, 단위센서, 촉각센서, 폴리머, 유연성

Abstract translation: 一种制造用于电容器的电极层和用于电容器的电极层的方法，使用该电极层的单元传感器以及使用该单元传感器的触觉传感器。 本发明的电极层包含聚合物基材; 并在聚合物基底上形成电极和信号传输线。 本发明的单位传感器包括由上述电极层制成的上电极层和下电极层; 和由聚合物制成的间隔层。 根据本发明，能够实现灵活性优异，制造容易且容易扩展的传感器。

公开(公告)号：KR100439700B1

公开(公告)日：2004-07-12

申请号：KR1020020041515

申请日：2002-07-16

Applicant: 한국과학기술원

Inventor： 조일주 ,  윤광석 ,  윤의식

IPC: G02F1/015

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: Disclosed is a micromirror actuator having a two-axis freedom and actuated by an electromagnetic force and fabrication method thereof. The micromirror actuator includes a substrate, a frame configured to be connected with the substrate, a micromirror configured to be connected with the frame, first and second torsion bars connecting the substrate with the frame, third and fourth torsion bars connecting the frame with the micromirror, four interdigitated cantilevers configured to be connected to the substrate, four connecting bars connecting the four interdigitated cantilevers with the frame, interconnection lines formed on the four interdigitated cantilevers and the micromirror, and first and second magnets installed outside the substrate. Since the micromirror actuator of the present invention can be actuated around two axes by electromagnetic force generated by electromagnetic field applied from outside, it is possible to obtain large force and large rotational angle. In addition, the micromirror actuator has a mechanically robust structure endurable against external impact, and is operable at a low voltage of 5V or loss. Further, it is possible to obtain a flat mirror surface sine the upper silicon layer of the SOI substrate is used as the mirror surface.

Abstract translation: 公开了一种具有两轴自由度并由电磁力驱动的微镜致动器及其制造方法。 微镜致动器包括基板，构造成与基板连接的框架，构造为与框架连接的微镜，将基板与框架连接的第一和第二扭杆，将框架与微镜连接的第三和第四扭杆 ，配置为连接到基板的四个叉指悬臂，将四个叉指悬臂与框架连接的四根连接杆，形成在四叉指悬臂和微镜上的互连线以及安装在基板外部的第一和第二磁体。 由于本发明的微镜致动器可以通过由外部施加的电磁场产生的电磁力围绕两个轴致动，所以可以获得大的力和大的旋转角度。 另外，微镜致动器具有耐受外部冲击的机械坚固结构，并且可在5V或低损耗电压下工作。 此外，可以使用SOI衬底的上硅层作为镜面来获得平坦的镜面表面。

公开(公告)号：KR100597870B1

公开(公告)日：2006-07-06

申请号：KR1020040022474

申请日：2004-04-01

Applicant: 한국과학기술원

Inventor： 윤광석 ,  윤의식

IPC: G01N33/50

CPC classification number: B01L3/502761 ,  B01L3/5025 ,  B01L2200/0668 ,  B01L2300/0816 ,  B01L2300/0877 ,  B01L2400/0424 ,  B01L2400/0487

Abstract: 본 발명은 미소 유체 칩(Microfluidic Chip)에 관한 것으로, 더욱 상세하게는 고속 스크리닝(High-throughput Screening) 또는 고속 분석(High-throughput Assay)을 위한 미소 유체 칩의 구조를 개선하여 고속 스크리닝 또는 고속 분석의 효율을 증대시킬 수 있는 미소 유체 칩에 관한 것이다.
본 발명에 따른, 고속 스크리닝 또는 고속 분석을 위한 미소 유체 칩은 1차원 또는 2차원으로 배열되며 시료를 고립시키기 위한 웰(Well)들; 상기 웰들 상단에 위치되며, 상하로 이동이 가능한 시료 고립 수단; 상기 시료 고립 수단의 상단부에 위치되며, 상기 시료 고립 수단을 상하로 이동시키기 위한 개폐 수단; 상기 시료가 주입되는 입구 및 상기 주입된 시료의 여분이 배출되는 출구; 및 상기 웰들 내에 시약이 주입되는 시약 주입로 및 상기 시약이 배출되는 시약 배출로를 포함하는 것을 특징으로 한다.
고속 스크리닝(High-throughput Screening), 고속 분석(High-throughput Assay), 이중전기이동(dielectrophoresis), 미소웰 어레이(micro-well array), MEMS(Microelectromechanical Systems),

公开(公告)号：KR1020050097236A

公开(公告)日：2005-10-07

申请号：KR1020040022474

申请日：2004-04-01

Applicant: 한국과학기술원

Inventor： 윤광석 ,  윤의식

IPC: G01N33/50

CPC classification number: B01L3/502761 ,  B01L3/5025 ,  B01L2200/0668 ,  B01L2300/0816 ,  B01L2300/0877 ,  B01L2400/0424 ,  B01L2400/0487 ,  B01L2200/10

Abstract: A micro-fluidic chip comprises a well for isolating a specimen, the well being arranged in a one- or two-dimension; a specimen-isolating device disposed above the well; an opening and closing device; an inlet for injection the specimen and an outlet for discharging an excess of the injected specimen; and a reagent-injecting passage for injecting a reagent and a reagent-discharging passage for discharging the reagent. A micro-fluidic chip comprises a well (10) for isolating a specimen, the well being arranged in a one- or two-dimension; a specimen-isolating device (20) disposed above the well and movable upwards and downwards; an opening and closing device (30) disposed above the specimen-isolating device and for moving the specimen-isolating device upwards and downwards; an inlet (40) for injection the specimen and an outlet (50) for discharging an excess of the injected specimen; and a reagent-injecting passage for injecting a reagent and a reagent-discharging passage for discharging the reagent.

公开(公告)号：KR1020040006923A

公开(公告)日：2004-01-24

申请号：KR1020020041515

申请日：2002-07-16

Applicant: 한국과학기술원

Inventor： 조일주 ,  윤광석 ,  윤의식

IPC: G02F1/015

CPC classification number: G02B26/085 ,  B81B3/0021 ,  B81B2201/042 ,  B81B2203/058 ,  Y10S359/904

Abstract: PURPOSE: A micromirror driver driven by electromagnetic force and a method for manufacturing the same are provided to drive a micromirror centering on two axes by electromagnetic force generated by using an electromagnetic field, thereby obtaining large force and large revolving angle. CONSTITUTION: If a current is applied to the first to fourth leading wires(510,520,530,540), electromagnetic force generated by the current flowing in the first leading wire and the second leading wire is in an opposite direction of electromagnetic force generated by the current flowing in the third leading wire and the fourth leading wire, thereby a micromirror(300) revolves centering on first and second torsion bars. If a current is applied to fifth and sixth leading wires(610,620), electromagnetic force generated by the current flowing in the fifth leading wire is in an opposite direction of electromagnetic force generated by the current flowing in the sixth leading wire, thereby the micromirror revolves centering on third and fourth torsion bars.

Abstract translation: 目的：提供一种由电磁力驱动的微镜驱动器及其制造方法，以通过使用电磁场产生的电磁力驱动以两轴为中心的微镜，从而获得较大的力和大的旋转角度。 构成：如果向第一至第四引线（510,520,530,540）施加电流，则由在第一引线和第二引线中流动的电流产生的电磁力与由电流流过的电流产生的电磁力的方向相反 第三导线和第四导线，由此微反射镜（300）以第一和第二扭杆为中心旋转。 如果对第五和第六导线（610,620）施加电流，则由在第五导线中流动的电流产生的电磁力与由第六导线中流动的电流产生的电磁力的方向相反，因此微反射镜 以第三和第四扭杆为中心。

公开(公告)号：KR1020020068096A

公开(公告)日：2002-08-27

申请号：KR1020010008341

申请日：2001-02-20

Applicant: 한국과학기술원

Inventor： 윤의식 ,  윤광석

IPC: F04F99/00

CPC classification number: F04B43/06 ,  F04B17/00 ,  F04B43/043

Abstract: PURPOSE: A micro-pump is provided to allow the micro-pump to be driven at a low voltage and reduce power consumption, while permitting the flexible films blocking both ends of the electrolyte storage tube to be bent in a significantly large degree. CONSTITUTION: A micro-pump comprises a storage tube(10); an electrolytic liquid(20) filling the storage tube; a liquid droplet(30) contained in the electrolytic liquid; metallic electrodes(40,45) arranged at both sides of the liquid droplet, such that the liquid droplet reciprocates within the storage tube; a voltage source for applying voltage to the space between the metallic electrodes; mesh-shaped structures(50,55) arranged between the liquid droplet and the metallic electrodes so as to prevent reaction occurring between the liquid droplet and the metallic electrodes; flexible films(60,65) blocking both ends of the storage tube; fluid passage tubes(70,80) contacting the flexible films so as to provide a path for passage of the pumped fluid, wherein each of the fluid passage tubes has an inlet and an outlet for passage of the pumped fluid; and check valves(71,72,81,82) arranged within the fluid passage tubes, respectively, so as to prevent backflow of the pumped fluid in the fluid passage tubes.

Abstract translation: 目的：提供微型泵，以使微型泵能够以低电压驱动并降低功耗，同时允许阻挡电解液存储管两端的柔性膜在很大程度上弯曲。 构成：微型泵包括储存管（10）; 填充所述储存管的电解液（20）; 包含在电解液中的液滴（30）; 布置在液滴两侧的金属电极（40,45），使得液滴在存储管内往复运动; 用于向金属电极之间的空间施加电压的电压源; 布置在液滴和金属电极之间的网状结构（50,55），以防止液滴和金属电极之间发生反应; 柔性膜（60,65）阻塞储存管的两端; 流体通道管（70,80）接触柔性膜，以便提供泵送流体通过的路径，其中每个流体通道管具有用于泵送流体通过的入口和出口; 以及分别布置在流体通道管内的止回阀（71,72,81,82），以防止泵送流体在流体通道管中的回流。