公开(公告)号：KR1020030096476A

公开(公告)日：2003-12-31

申请号：KR1020020032989

申请日：2002-06-12

Applicant: 한국과학기술원

Inventor： 권대갑 ,  윤형길 ,  오형렬 ,  이준희

IPC: G11B7/00

Abstract: PURPOSE: A device and a method for assembling and evaluating 2-group lenses are provided to analyze phase information for interference patterns captured by a CCD camera to align optical axes of 2-group lenses, thereby speedily carrying out the assembling and evaluating of the 2-group lenses. CONSTITUTION: A device for assembling and evaluating 2-group lenses includes a base for disposing a second lens(12) and mounted with a beam generator(30) at a side of the base for generating laser beams. A beam splitter(40) is disposed in the light advancing direction of the beam generator. A reference mirror(50) is disposed in the advancing direction of one of the splitted beams. A folding mirror(60) is disposed in the advancing direction of another splitted beam. A piezo-electric driver(52) is connected to the reference mirror for the micro control of a distance between the reference mirror and the beam splitter. The beam reflected to the folding mirror is incident to an optical axis(z) of the second lens fixed to the base. Another folding mirror is disposed to a bottom surface of the second lens for obtaining a beam reflected from a detection surface. A CCD camera(70) is disposed around the beam splitter for photographing the interference pattern of the beams coming from the reference and folding mirrors. A computer(80) electrically connected to the CCD camera analyzes phase information from image information input to the CCD camera and determines the assembling work if the phase information is in a reference value range. If the phase information is beyond the reference value range, the computer drives a series of programs to drive an xy-stage/z-axis drivers for controlling the position of the first lens and the distance between the first and second lenses.

Abstract translation: 目的：提供一种用于组合和评估2组透镜的装置和方法，用于分析由CCD相机拍摄的干涉图案的相位信息，以对准2组透镜的光轴，从而快速进行2组透镜的组装和评估 - 组镜头。 构成：用于组合和评估2组透镜的装置包括用于设置第二透镜的基座，并且在基座的一侧安装有光束发生器（30），用于产生激光束。 分束器（40）沿光束发生器的光前进方向设置。 参考反射镜（50）设置在分割光束之一的前进方向上。 折叠镜（60）沿另一分割光束的前进方向设置。 压电驱动器（52）连接到参考反射镜，用于对参考反射镜和分束器之间的距离进行微控制。 反射到折叠镜的光束入射到固定到基座的第二透镜的光轴（z）。 另一个折叠镜设置在第二透镜的底表面上，用于获得从检测表面反射的光束。 CCD照相机（70）设置在分束器周围，用于拍摄来自参考和折叠镜的​​光束的干涉图案。 电连接到CCD摄像机的计算机（80）分析从输入到CCD照相机的图像信息的相位信息，并且如果相位信息在参考值范围内，则确定组装工作。 如果相位信息超过参考值范围，则计算机驱动一系列程序来驱动用于控制第一透镜的位置和第一和第二透镜之间的距离的xy级/ z轴驱动器。

公开(公告)号：KR100454264B1

公开(公告)日：2004-10-26

申请号：KR1020020032989

申请日：2002-06-12

Applicant: 한국과학기술원

Inventor： 권대갑 ,  윤형길 ,  오형렬 ,  이준희

IPC: G11B7/00

Abstract: PURPOSE: A device and a method for assembling and evaluating 2-group lenses are provided to analyze phase information for interference patterns captured by a CCD camera to align optical axes of 2-group lenses, thereby speedily carrying out the assembling and evaluating of the 2-group lenses. CONSTITUTION: A device for assembling and evaluating 2-group lenses includes a base for disposing a second lens(12) and mounted with a beam generator(30) at a side of the base for generating laser beams. A beam splitter(40) is disposed in the light advancing direction of the beam generator. A reference mirror(50) is disposed in the advancing direction of one of the splitted beams. A folding mirror(60) is disposed in the advancing direction of another splitted beam. A piezo-electric driver(52) is connected to the reference mirror for the micro control of a distance between the reference mirror and the beam splitter. The beam reflected to the folding mirror is incident to an optical axis(z) of the second lens fixed to the base. Another folding mirror is disposed to a bottom surface of the second lens for obtaining a beam reflected from a detection surface. A CCD camera(70) is disposed around the beam splitter for photographing the interference pattern of the beams coming from the reference and folding mirrors. A computer(80) electrically connected to the CCD camera analyzes phase information from image information input to the CCD camera and determines the assembling work if the phase information is in a reference value range. If the phase information is beyond the reference value range, the computer drives a series of programs to drive an xy-stage/z-axis drivers for controlling the position of the first lens and the distance between the first and second lenses.

Abstract translation: 目的：提供一种用于组装和评估2组透镜的装置和方法，以分析由CCD照相机拍摄的干涉图案的相位信息以对准2组透镜的光轴，从而快速地进行2组透镜 组镜头。 本发明提供了一种用于组装和评估2组透镜的装置，包括用于放置第二透镜（12）的基座，并且在基座的一侧安装有用于产生激光束的光束发生器（30）。 分束器（40）沿光束发生器的光前进方向设置。 参考反射镜（50）设置在其中一个分束的前进方向上。 折叠式反射镜（60）设置在另一分束的前进方向上。 压电驱动器（52）连接到参考反射镜，用于微控制参考反射镜和分束器之间的距离。 反射到折叠式反射镜的光束入射到固定到基座的第二透镜的光轴（z）。 另一个折叠式反射镜设置在第二透镜的底面上，用于获得从检测表面反射的光束。 CCD照相机（70）设置在分束器周围，用于拍摄来自参考镜和折叠镜的​​光束的干涉图案。 电连接到CCD照相机的计算机（80）根据输入到CCD照相机的图像信息分析相位信息，并且如果相位信息处于参考值范围内则确定组装工作。 如果相位信息超出参考值范围，则计算机驱动一系列程序以驱动用于控制第一透镜的位置和第一透镜与第二透镜之间的距离的xy-级/ z-轴驱动器。