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公开(公告)号：KR102171475B1
公开(公告)日：2020-10-29
申请号：KR1020180125759
申请日：2018-10-22
Applicant: 한국과학기술원
IPC: H01L31/0392 , H01L31/072 , H01L31/042 , H01L31/0224 , H01L31/036 , H01L31/18
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