公开(公告)号：KR101449850B1

公开(公告)日：2014-10-13

申请号：KR1020130056998

申请日：2013-05-21

Applicant: 한국과학기술원

Inventor： 정연식 ,  허윤형 ,  정재원 ,  김종민

IPC: H01L21/20 ,  B29C59/00 ,  H01L21/22

Abstract: In a method for forming block copolymer pattern, provided is a method for forming block copolymer pattern, comprising: a step for contacting an annealing pad where an organic solvent is absorbed in a block copolymer applied to a substrate; and a step for which the block copolymer is self-assembled by the organic solvent discharged from the annealing pad.

Abstract translation: 在形成嵌段共聚物图案的方法中，提供了一种形成嵌段共聚物图案的方法，包括：使有机溶剂吸收在施加到基材上的嵌段共聚物中的退火焊盘的接触步骤; 和通过从退火焊盘排出的有机溶剂自组装嵌段共聚物的步骤。