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公开(公告)号：KR102041830B1
公开(公告)日：2019-11-27
申请号：KR1020180076988
申请日：2018-07-03
Applicant: 한국과학기술원
IPC: H01L21/02 , H01L29/06 , H01L21/027 , H01L21/762 , H01L21/768
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