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公开(公告)号：KR1020110078228A
公开(公告)日：2011-07-07
申请号：KR1020090134980
申请日：2009-12-30
Applicant: 한국기술교육대학교 산학협력단
IPC: G01B11/24 , G01B11/30 , G01N21/894
Abstract: PURPOSE: Contactless shape measuring device and method are provided to enable the shape of a sample to be measured in a contactless manner by making a stage stop only for a grid having a shape of a micro hole and determining the error of the micro hole of the sample. CONSTITUTION: A contactless shape measuring device comprises a stage(10), a camera(40) and an image processing unit(60). The stage holds a sample, which is a target and has a micro hole. The camera is installed on a contactless support. The camera comprises an illumination unit. The camera takes the images of the sample on the stage. The processing unit controls the camera to set the origin of the sample. The processing unit reads an excel file storing CAD data to analyze the grid of the sample. The processing unit makes the stage stop only for a grid where there is a shape of a micro hole. The processing unit determines the error of the micro hole of the sample.
Abstract translation: 目的：提供非接触形状测量装置和方法，以便通过仅对具有微孔形状的格栅进行台架停止来测量样品的形状，并且确定微孔的误差 样品。 构成：非接触形状测量装置包括台（10），相机（40）和图像处理单元（60）。 舞台上有一个样本，它是一个目标，有一个微孔。 相机安装在非接触式支架上。 相机包括照明单元。 相机将样品的图像拍摄在舞台上。 处理单元控制相机设置样品的原点。 处理单元读取存储CAD数据的Excel文件来分析样本的网格。 处理单元仅对具有微孔形状的格栅进行平台停止。 处理单元确定样品的微孔的误差。
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公开(公告)号：KR101173941B1
公开(公告)日：2012-08-16
申请号：KR1020090134980
申请日：2009-12-30
Applicant: 한국기술교육대학교 산학협력단
IPC: G01B11/24 , G01B11/30 , G01N21/894
Abstract: 본발명은비접촉형상측정장치및 그방법을제공하기위한것으로, 측정대상이며미세구멍이형성된시편이놓이도록하는스테이지와; 비접촉지지대에설치되고, 조명을구비하며, 상기스테이지에놓인상기시편의이미지를촬영하는카메라와; 상기카메라를제어하여상기시편의원점을잡고, CAD 도면의데이터가저장된엑셀파일을읽어들여상기시편의그리드를분석하며, 미세홀의형상이존재하는그리드의경우에만상기스테이지가멈추도록제어하여상기시편의미세홀의에러여부를판별하는이미지처리부;를포함하여구성함으로서, 카메라를이용하여시편의원점을잡고, CAD 도면의데이터가저장된엑셀파일을읽어들여시편의그리드를분석하며, 미세홀의형상이존재하는그리드의경우에만스테이지가멈추도록제어하여시편의미세홀의에러여부를판별해시편에대해비 접촉방식으로형상을측정함으로서마이크로미터단위에서미세형상을측정하여미세형상측정의자동화가가능할수 있게되는것이다.
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