公开(公告)号：KR1020120130677A

公开(公告)日：2012-12-03

申请号：KR1020110123504

申请日：2011-11-24

Applicant: 한국전자통신연구원

Inventor： 이대식 ,  박석한 ,  최성율 ,  정문연 ,  김승환

IPC: B01D69/02 ,  G03F3/00 ,  G01N33/49 ,  C23C14/00

CPC classification number: B01D71/021 ,  B01D69/02 ,  B01D2325/028 ,  C01B32/182 ,  C23C14/0605

Abstract: PURPOSE: A separating apparatus using self-assembling material-based graphene nanostructure as a separating part and a manufacturing method of the same are provided to improve the reducibility of components and to be integrated with microfluidic channels and electric components. CONSTITUTION: A manufacturing method of a separating apparatus using self-assembling material-based graphene nanostructure includes the following steps: protective layers are formed on the lower side and the upper side of a substrate(201); parts of the lower side and the upper side of the substrate are exposed by patterning the protective layers; the protective layers on the exposed parts of the substrate are etched; graphene nanostructure with columnar pores is transferred on the upper side of the substrate; and a nanostructure etching mask layer is removed from the graphene nanostructure.

Abstract translation: 目的：提供使用自组装材料的石墨烯纳米结构作为分离部分的分离装置及其制造方法，以提高部件的还原性并与微流体通道和电气部件集成。 构成：使用自组装材料的石墨烯纳米结构的分离装置的制造方法包括以下步骤：在基板（201）的下侧和上侧形成保护层; 通过图案化保护层来暴露基板的下侧和上侧的部分; 蚀刻衬底的暴露部分上的保护层; 具有柱状孔的石墨烯纳米结构转移到基板的上侧; 并且从石墨烯纳米结构去除纳米结构蚀刻掩模层。