公开(公告)号：KR100459536B1

公开(公告)日：2004-12-03

申请号：KR1020020063226

申请日：2002-10-16

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임율균 ,  정해빈 ,  김대용

IPC: H01J9/24

Abstract: PURPOSE: A mosaic type chuck is provided to achieve a desired flatness without limitation of size of processing machine by assembling a plurality of part chucks. CONSTITUTION: A mosaic type chuck comprises a plurality of part chuck(1), a base plate(3), a plurality of height adjusting pins(5), and a plurality of part chuck height adjusting devices(7). The base plate is arranged at the lower part of the part chuck and supports and fixes the part chuck. The height adjusting pins are assembled to the base plate and positioned at a screw hole mounted on the base plate in such a manner that the height adjusting pins are adjusted to have the same height each other. The part chuck height adjusting devices fix the part chuck to the base plate and adjust the height and angle of the part chuck.

Abstract translation: 目的：提供马赛克型卡盘以通过组装多个零件卡盘来实现期望的平坦度而不限制加工机器的尺寸。 一种镶嵌式卡盘，包括多个零件卡盘（1），底板（3），多个高度调节销（5）和多个零件卡盘高度调节装置（7）。 底盘安装在零件卡盘的下部，并支撑和固定零件卡盘。 高度调节销组装到底板上，并且定位在安装在底板上的螺纹孔处，使得高度调节销被调节成彼此具有相同的高度。 零件卡盘高度调整装置将零件卡盘固定在底板上，并调整零件卡盘的高度和角度。

公开(公告)号：KR1020040033934A

公开(公告)日：2004-04-28

申请号：KR1020020063226

申请日：2002-10-16

Applicant: 한국전자통신연구원

Inventor： 곽창수 ,  임율균 ,  정해빈 ,  김대용

IPC: H01J9/24

Abstract: PURPOSE: A mosaic type chuck is provided to achieve a desired flatness without limitation of size of processing machine by assembling a plurality of part chucks. CONSTITUTION: A mosaic type chuck comprises a plurality of part chuck(1), a base plate(3), a plurality of height adjusting pins(5), and a plurality of part chuck height adjusting devices(7). The base plate is arranged at the lower part of the part chuck and supports and fixes the part chuck. The height adjusting pins are assembled to the base plate and positioned at a screw hole mounted on the base plate in such a manner that the height adjusting pins are adjusted to have the same height each other. The part chuck height adjusting devices fix the part chuck to the base plate and adjust the height and angle of the part chuck.

Abstract translation: 目的：通过组装多个部件卡盘，提供镶嵌式卡盘以实现所需的平面度，而不受加工机尺寸的限制。 构成：马赛克型卡盘包括多个部件卡盘（1），基板（3），多个高度调节销（5）和多个部件卡盘高度调节装置（7）。 基板布置在部件卡盘的下部，并支撑并固定部件卡盘。 将高度调节销组装到基板上并定位在安装在基板上的螺钉孔中，使得高度调节销被调节为具有相同的高度。 零件卡盘高度调节装置将零件卡盘固定在基板上，调整零件卡盘的高度和角度。