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公开(公告)号:KR101777598B1
公开(公告)日:2017-09-14
申请号:KR1020110106020
申请日:2011-10-17
Applicant: 한국전자통신연구원
IPC: H01L31/04 , H01L31/0224 , H01L31/18
CPC classification number: H01L31/0749 , H01L31/0322 , Y02E10/541 , Y02P70/521
Abstract: 태양전지의제조방법이제공된다. 그의제조방법은기판상에하부전극을형성하는단계; 상기하부전극상에광 흡수층을형성하는단계; 상기광 흡수층 상에버퍼층을형성하는단계; 상기버퍼층 상에서로다른전기적특성을갖는진성층과투명전극을포함하는윈도우층을형성하는단계를포함한다. 여기서, 상기진성층과투명전극은불순물로도핑된금속산화물로이루어진단일타깃을사용하는스퍼터링공정에의해형성될수 있다.
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公开(公告)号:KR1020130041631A
公开(公告)日:2013-04-25
申请号:KR1020110106020
申请日:2011-10-17
Applicant: 한국전자통신연구원
IPC: H01L31/04 , H01L31/0224 , H01L31/18
CPC classification number: H01L31/0749 , H01L31/0322 , Y02E10/541 , Y02P70/521 , H01L31/04 , H01L31/0224 , H01L31/022466 , H01L31/022475 , H01L31/022483 , H01L31/075 , H01L31/18 , H01L31/1884
Abstract: PURPOSE: A method for manufacturing a solar cell is provided to form a transparent electrode and an intrinsic layer with different electric properties by a sputtering process using one target. CONSTITUTION: A bottom electrode is formed on a substrate. A light absorbing layer(30) is formed on the bottom electrode. A buffer layer(40) is formed on the light absorbing layer. A window layer(70) including an intrinsic layer and a transparent electrode with different electric properties is formed on the buffer layer. The intrinsic layer and the transparent electrode are formed by a sputtering process using one target made of metal oxide doped with metal impurities.
Abstract translation: 目的:提供一种用于制造太阳能电池的方法,以通过使用一个靶的溅射工艺形成具有不同电特性的透明电极和本征层。 构成:底部电极形成在基板上。 在底部电极上形成光吸收层(30)。 在光吸收层上形成缓冲层(40)。 在缓冲层上形成包括本征层和具有不同电特性的透明电极的窗口层(70)。 本征层和透明电极通过使用掺杂有金属杂质的金属氧化物制成的一个靶的溅射工艺形成。
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