公开(公告)号：KR100809421B1

公开(公告)日：2008-03-05

申请号：KR1020060096432

申请日：2006-09-29

Applicant: 한국전자통신연구원

Inventor： 박종혁 ,  맹성렬 ,  김상협 ,  박래만 ,  줄리안가드너 ,  플로린유드리아 ,  빌밀른

IPC: G01N27/12 ,  B82Y15/00

Abstract: A multi-gas sensor having a nano-size sensing material and a sensing method using the same are provided to lower an operation temperature of the sensor and to reduce power consumption of the sensor. A multi-gas sensor having a nano-size sensing material includes a semiconductor substrate(10), an insulating layer(12), small heaters(16), and a heater electrode. The semiconductor substrate is a silicon substrate. The insulating layer is disposed on the silicon substrate. The small heaters are disposed in the insulating layer at predetermined intervals. The small heaters receive power from the heater electrode. A portion of the semiconductor substrate is removed to expose the insulating layer under the small heaters. After removing the portion of the semiconductor substrate, the sensor can be implemented in a membrane shape.

Abstract translation: 提供具有纳米尺寸感测材料的多气体传感器和使用其的感测方法以降低传感器的操作温度并降低传感器的功耗。 具有纳米尺寸感测材料的多气体传感器包括半导体衬底（10），绝缘层（12），小型加热器（16）和加热器电极。 半导体衬底是硅衬底。 绝缘层设置在硅衬底上。 小型加热器以预定间隔设置在绝缘层中。 小型加热器从加热器电极接收电力。 去除半导体衬底的一部分以在小型加热器下露出绝缘层。 在去除半导体衬底的部分之后，传感器可以实现为膜形状。