公开(公告)号：KR100451409B1

公开(公告)日：2004-10-06

申请号：KR1020020062750

申请日：2002-10-15

Applicant: 한국전자통신연구원

Inventor： 류호준 ,  하두영 ,  전치훈 ,  김윤태

IPC: G02B26/08

CPC classification number: G02B26/085 ,  Y10S359/90

Abstract: The present invention relates to a micro-optical switch and comprises an external frame having a plurality of holes inside; an internal frame positioned in the plurality of holes and having holes inside; light reflecting means positioned inside the holes of the internal frame; external magnetic substances positioned at both sides of the external frame; outside torsion hinge for connecting the external frame to the internal frame and having 45° to the magnetic field produced by the external magnetic substances; inside torsion hinge for connecting the internal frame to the light reflecting means and for being perpendicular to said outside torsion hinge; an outside coil wired in the internal frame; and an inside coil wired in the light reflecting means, and is characterized in that the light reflecting means and the internal frame are preferably rotated by the inside torsion hinge and the outside torsion hinge as an axis when a current is applied to the inside coil and the outside coil.

Abstract translation: 微型光开关技术领域本发明涉及一种微型光开关，其包括内部具有多个孔的外部框架; 内部框架，所述内部框架位于所述多个孔中并且在内部具有孔; 位于内框架的孔内的光反射装置; 位于外框两侧的外部磁性物质; 外部扭转铰链，用于将外部框架连接到内部框架并具有45°角; 到由外部磁性物质产生的磁场; 内部扭转铰链，用于将内部框架连接到光反射装置并垂直于所述外部扭转铰链; 外部线圈连接在内部框架中; 以及布置在光反射装置中的内侧线圈，并且其特征在于，当电流施加到内侧线圈时，光反射装置和内侧框架优选地通过内侧扭转铰链和外侧扭转铰链作为轴旋转，并且 外线圈。

公开(公告)号：KR1020040033598A

公开(公告)日：2004-04-28

申请号：KR1020020062750

申请日：2002-10-15

Applicant: 한국전자통신연구원

Inventor： 류호준 ,  하두영 ,  전치훈 ,  김윤태

IPC: G02B26/08

CPC classification number: G02B26/085 ,  Y10S359/90

Abstract: PURPOSE: A micro optical switch and a fabricating method thereof are provided to rotate an optical reflector around two shafts by using a torsional hinge having an angel of 45 degrees to the magnetic field. CONSTITUTION: A micro optical switch includes an external frame(112), an internal frame(110), an optical reflector(108), a plurality of external magnetic bodies(102a,102b), an external torsional hinge(104), an internal torsional hinge(106), an external coil(116), and an internal coil(114). The external frame(112) includes an internal hole. The internal frame(110) is located within the internal hole of the external frame. The internal frame includes an internal hole. The optical reflector(108) is located within the internal hole of the internal frame. The external magnetic bodies(102a,102b) are installed at both sides of the external frame. The external torsional hinge(104) is used for connecting the external frame to the optical reflector. The internal torsional hinge(106) is used for connecting the internal frame to the optical reflector. The external coil(116) is formed within the internal frame. The internal coil(114) is formed within the optical reflector. The optical reflector and the internal frame are rotated around the internal torsional hinge and the external torsional hinge when the current is applied to the internal coil and the external coil.

Abstract translation: 目的：提供一种微型光开关及其制造方法，通过使用具有与磁场成45度的角度的扭转铰链将光学反射器围绕两个轴旋转。 构造：微型光学开关包括外部框架（112），内部框架（110），光学反射器（108），多个外部磁性体（102a，102b），外部扭转铰链（104），内部 扭转铰链（106），外部线圈（116）和内部线圈（114）。 外框（112）包括内孔。 内部框架（110）位于外部框架的内部孔内。 内部框架包括内部孔。 光学反射器（108）位于内部框架的内部孔内。 外部磁性体（102a，102b）安装在外部框架的两侧。 外部扭转铰链（104）用于将外部框架连接到光学反射器。 内部扭转铰链（106）用于将内部框架连接到光学反射器。 外部线圈（116）形成在内部框架内。 内部线圈（114）形成在光学反射器内。 当电流施加到内部线圈和外部线圈时，光学反射器和内部框架围绕内部扭转铰链和外部扭转铰链旋转。

公开(公告)号：KR1020040015497A

公开(公告)日：2004-02-19

申请号：KR1020020047763

申请日：2002-08-13

Applicant: 한국전자통신연구원

Inventor： 하두영 ,  류호준 ,  최창억 ,  전치훈 ,  김윤태

IPC: G02B26/08

CPC classification number: G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  Y10S359/90

Abstract: PURPOSE: A scanning micromirror for use in an optical communication and a method for manufacturing the same are provided to have a large usable rotational angle and to have a rapid response speed due to a small air braking. CONSTITUTION: A scanning micromirror for use in an optical communication includes an outer frame(114), an inner frame(112), an optical reflection member(110), a plurality of first distortion recover members(122), a plurality of second distortion recover members(118), a first comb type electrostatic driving member(118) and a second comb type electrostatic driving member(116). The outer frame(114) has a hole inside. The inner frame(112) is placed inside of the hole of the outer frame(114) and has a hole inside thereof. The optical reflection member(110) is placed inside of the hole of the inner frame(112). The plurality of first distortion recover members(122) is connected between the inner wall of the outer frame(114) and the outer wall of the inner frame(112) for supporting the inner frame(112). The plurality of second distortion recover members(118) is connected between the inner wall of the inner frame(112) and the optical reflection member(110) for supporting the optical reflection member(110). The first comb type electrostatic driving member(118) gives an electrostatic driving force so as to rotate the inner frame(112) along the first distortion recover members(122) as an axis. And, the second comb type electrostatic driving member(116) gives an electrostatic driving force so as to rotate the optical reflection member(110) along the second distortion recover members(118) as an axis.

Abstract translation: 目的：提供用于光通信的扫描微镜及其制造方法，以具有大的可用旋转角度并且由于小的空气制动而具有快速的响应速度。 构成：用于光通信的扫描微镜包括外框架（114），内框架（112），光反射构件（110），多个第一失真恢复构件（122），多个第二失真 回收构件（118），第一梳状静电驱动构件（118）和第二梳状静电驱动构件（116）。 外框（114）内有孔。 内框架（112）被放置在外框架（114）的孔的内部并且在其内部具有孔。 光学反射构件（110）被放置在内框架（112）的孔的内部。 多个第一变形恢复构件（122）连接在外框架（114）的内壁和用于支撑内框架（112）的内框架（112）的外壁之间。 多个第二失真恢复构件（118）连接在内框架（112）的内壁和用于支撑光反射构件（110）的光反射构件（110）之间。 第一梳型静电驱动构件（118）产生静电驱动力，以沿着作为轴的第一失真恢复构件（122）旋转内框架（112）。 并且，第二梳状静电驱动构件（116）产生静电驱动力，以使光学反射构件（110）沿着作为轴的第二畸变恢复构件（118）旋转。

公开(公告)号：KR100469062B1

公开(公告)日：2005-02-02

申请号：KR1020020047763

申请日：2002-08-13

Applicant: 한국전자통신연구원

Inventor： 하두영 ,  류호준 ,  최창억 ,  전치훈 ,  김윤태

IPC: G02B26/08

CPC classification number: G02B6/3518 ,  G02B6/3556 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0841 ,  Y10S359/90

Abstract: The present invention relates to a scanning micromirror for optical communications. The scanning micromirror comprises an outer frame having an aperture therein, an inner frame located within the aperture of the outer frame and having an aperture therein, an optical reflecting means located within the aperture of the inner frame, a plurality of first torsion springs connected between an inner wall of the outer frame and an outer wall of the inner frame, for supporting the inner frame, a plurality of second torsion springs connected between the inner wall of the inner frame and the optical reflecting means, for supporting the optical reflecting means, first comb-type electrostatic actuators for applying electrostatic torque by which the inner frame is rotated about an axis of the first torsion springs, and second comb-type electrostatic actuators for applying electrostatic torque by which the optical reflecting means is rotated about an axis of the second torsion springs. Therefore, as the present invention uses vertical comb-type electrostatic actuators, an available rotation angle can be made large compared to a conventional case using a parallel-plate type electrostatic actuator. As the vertical asymmetry of the fixed combs and the movable combs are large, a large rotation angle can be obtained in non-resonant mode as well as resonant mode.

Abstract translation: 用于光通信的扫描微反射镜 扫描微镜包括其中具有孔的外框架，位于外框架的孔内并在其中具有孔的内框架，位于内框架的孔内的光学反射装置，连接在第一扭转弹簧和第二扭转弹簧之间的多个第一扭转弹簧， 外框架的内壁和内框架的外壁，用于支撑内框架;多个第二扭簧，连接在内框架的内壁和光反射装置之间，用于支撑光反射装置， 用于施加静电转矩的第一梳形静电致动器，通过该静电转矩使内框围绕第一扭转弹簧的轴线旋转;以及第二梳形静电致动器，用于施加静电转矩，通过该静电转矩使光学反射装置围绕 第二个扭力弹簧。 因此，由于本发明使用垂直梳状静电致动器，所以与使用平行板型静电致动器的传统情况相比，可用的旋转角度可以较大。 由于固定梳和可动梳的垂直不对称性很大，所以在非谐振模式和谐振模式下可以获得大的旋转角度。