유도 결합 RF플라즈마를 이용한 플러렌의 제조장치 및 방법
    1.
    发明授权
    유도 결합 RF플라즈마를 이용한 플러렌의 제조장치 및 방법 失效
    射频等离子体制造工艺的设备和工艺

    公开(公告)号:KR1019950001658B1

    公开(公告)日:1995-02-28

    申请号:KR1019920000774

    申请日:1992-01-21

    Abstract: The fulleren is produced by (a) generating a glow discharge at a low pressure of the torch, (b) inserting a high frequency wave electric field induced from the coil into the discharging tube, and flowing an argon plasma gas into the tube to generate an inductively coupled plasma, (c) reacting the plasma with a graphite powder, (d) cooling the reactant gas, and (d) separating a gas and product from the reactant gas. The apparatus comprises a radio frequency generating device, a raw powder-supplying device, a gas-supplying device, a torch, a reacting chamber, an exhaust gas-cooling part, a separating filter and a vacuum pump.

    Abstract translation: 富勒是通过(a)在割炬的低压下产生辉光放电而产生的,(b)将从线圈感应的高频波电场插入放电管,并将氩等离子体气体流入管中以产生 电感耦合等离子体,(c)使等离子体与石墨粉末反应,(d)冷却反应气体,和(d)从反应气体中分离气体和产物。 该装置包括射频发生装置,原料粉供给装置,气体供给装置,手电筒,反应室,排气冷却部,分离过滤器和真空泵。

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