公开(公告)号：KR100833648B1

公开(公告)日：2008-05-30

申请号：KR1020070050833

申请日：2007-05-25

Applicant: 한국표준과학연구원

Inventor： 김재성 ,  조민웅 ,  강상우 ,  성대진 ,  신용현

IPC: F04D23/00 ,  F04D25/02

Abstract: An ultra-high vacuum exhausting system is provided to have a vacuum reservoir allowing a turbo pump to be performed normally from low vacuum to high vacuum. An ultra-high vacuum exhausting system includes a turbo pump(10), a vacuum reservoir(20), and a sub pump(50). The turbo pump maintains predetermined vacuum degree of the vacuum reservoir. The vacuum reservoir is connected to an exhaust side of the turbo pump and maintains vacuum pressure of the turbo pump below critical vacuum pressure without additional pumping for a long time. The sub pump operates when chamber pressure of the vacuum reservoir rises over a predetermined vacuum degree.

Abstract translation: 提供超高真空排气系统以具有允许涡轮泵从低真空到高真空正常执行的真空容器。 超高真空排气系统包括涡轮泵（10），真空容器（20）和副泵（50）。 涡轮泵保持真空容器的预定真空度。 真空容器连接到涡轮泵的排气侧，并将涡轮泵的真空压力保持在临界真空压力以下，而不需要长时间的泵送。 当真空容器的室压力上升超过预定的真空度时，副泵运行。