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公开(公告)号：KR102102308B1
公开(公告)日：2020-04-20
申请号：KR1020180028568
申请日：2018-03-12
Applicant: 한국표준과학연구원
IPC: H01L21/027 , H01L21/033 , H01L21/3065 , H01L21/3213
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