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公开(公告)号:KR101996542B1
公开(公告)日:2019-07-04
申请号:KR1020170170452
申请日:2017-12-12
Applicant: 한국항공우주연구원
Inventor: 박상욱 , 이동건 , 김성준 , 김태욱
IPC: G01B7/16 , G01L1/22 , H01L41/04 , G01D1/12