公开(公告)号：KR100653959B1

公开(公告)日：2006-12-05

申请号：KR1020050117736

申请日：2005-12-05

Applicant: 한국화학연구원

Inventor： 이창진 ,  강영구 ,  임종선 ,  옥정림

IPC: G03F7/00

Abstract: Provided are a method for forming a pattern of self-assembling monomolecular layer by using a printing technique, and a method for forming a pattern comprising dipping the pattern of self-assembling monomolecular layer into polymer solution capable of ion bonding, and forming a multilayered thin film by self-assembling mode. The method for forming a patterned substrate comprises the steps of (i) printing a compound of formula(1), X-(CH2)n-Y, on substrate by using inkjet, roll, or microcontact printing method, so as to form a pattern of monomolecular layer, and (ii) dipping the substrate into polymer solution reacting with the monomolecular layer to form a high molecular layer, and using the polymer layer as etching resist. In the formula(1), n is an integer of 2-20, X is thiol(-SH), imidazole or silyl group, Y is a functional group capable of ion bonding, and R is ethoxy or methoxy. The method for patterning a substrate comprises the steps of (a) forming a polymer film by the method as the above, (b) treating the film with heat and reacting the polymers with each other, so as to improve thermal and physical stability of the film.

Abstract translation: 本发明提供一种使用印刷技术形成自组装单分子层图案的方法和形成图案的方法，该方法包括将自组装单分子层图案浸入能够离子键合的聚合物溶液中，并形成多层薄膜 电影采用自组装模式。 形成图案化衬底的方法包括以下步骤：（i）通过使用喷墨，辊式或微接触印刷方法在衬底上印刷式（1）的化合物X-（CH 2）n -Y，从而形成 （ii）将基板浸入与单分子层反应的聚合物溶液中以形成高分子层，并且使用该聚合物层作为抗蚀剂。 在式（1）中，n是2-20的整数，X是硫醇（-SH），咪唑或甲硅烷基，Y是能够离子键合的官能团，并且R是乙氧基或甲氧基。 用于图案化基板的方法包括以下步骤：（a）通过如上所述的方法形成聚合物膜，（b）用热处理膜并使聚合物彼此反应，以改善聚合物膜的热和物理稳定性 电影。