Abstract:
PURPOSE: A formation method of a self-assembled monolayer, and a producing method the copper wire of the semiconductor device using thereof are provided to secure the high reliability of the self-assembled monolayer by forming a copper seed film with the uniform thickness. CONSTITUTION: A formation method of a self-assembled monolayer comprises the following steps: reforming a semiconductor substrate to have a hydrogen radical on the surface; irradiating UV rays to bond a Cl radical on the surface of the semiconductor substrate, while supplying Cl_2 gas; and supplying NH_3 gas to the surface of the semiconductor substrate to substitute the Cl radical to an amine radical.
Abstract:
본 발명은 보이드(void) 및 심(seam)의 발생을 방지할 수 있는 반도체 소자의 구리배선 및 그 형성방법을 개시한다. 개시된 본 발명에 따른 반도체 소자의 구리배선 형성방법은, 반도체 기판의 상부에 배선 형성 영역을 갖는 층간절연막을 형성하는 단계; 상기 배선 형성 영역 표면을 포함한 층간절연막 상에 자기조립단분자막(Self Assembled Monolayer)을 형성하는 단계; 상기 자기조립단분자막의 표면에 촉매입자들을 흡착시키는 단계; 상기 촉매입자들이 흡착된 자기조립단분자막 상에 무전해 도금법으로 구리 씨드막을 형성하는 단계; 및 상기 구리 씨드막 상에 상기 배선 형성 영역을 매립하도록 구리막을 형성하는 단계;를 포함한다.
Abstract:
PURPOSE: A copper wire of a semiconductor device and a forming method thereof are provided to improve the reliability of a copper wire by suppressing a seam and a void in a wire forming region. CONSTITUTION: An interlayer dielectric layer(102) with a wire forming region is formed on the upper side of a semiconductor substrate(100). A self-assembled monolayer(110) is formed on the surface of the wire forming region. A plurality of catalyst particles(112) are absorbed on the surface of the self-assembled monolayer. A metal layer(114) is formed on the self-assembled monolayer including the catalyst particles. A copper layer(116) is formed on the metal layer to bury the wire forming region.
Abstract:
PURPOSE: An organic and inorganic composite membrane with improved ion conductivity is provided to easily control thickness and size, to have a simple manufacturing process, and to suppress methanol crossover, thereby increasing fuel cell performance. CONSTITUTION: An organic and inorganic composite membrane comprises a hydrogen ion conductive polymer film; and an organic and inorganic composite particle which is located in the hydrogen ion conductive polymer film and has an inorganic particle, as a core, and a polymer with a hydrogen ion-exchanging group, as a shell. The hydrogen ion conductive polymer film consists of a fluorine-based polymer or hydrocarbon-based polymer. A membrane-electrode assembly comprises a negative electrode and positive electrode opposite to each other, and an electrolyte membrane between the positive electrode and negative electrode. The electrolyte membrane is an organic and inorganic composite membrane.